Internal stresses in TiN/Ti multilayer coatings deposited by large area filtered arc deposition

Journal of Applied Physics

Volumn 104, Issue 9, 2008, Pages

  Cheng, Y H ^a   Browne, T ^a   Heckerman, B ^a   Jiang, J C ^b   Meletis, E I ^b   Bowman, C ^c   Gorokhovsky, V ^c  

^a American Eagle Instruments Inc   (United States)

^b The University of Texas at Arlington   (United States)

^c Arcomac Surface Engineering LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; CRYSTALLINE MATERIALS; DEFECT DENSITY; MULTILAYERS; TIN; TITANIUM; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

(002) PEAKS; CRYSTALLINE STRUCTURES; CRYSTALLINITY; DEPOSITED COATINGS; FILTERED ARC DEPOSITIONS; INTERLAYER THICKNESSES; INTERNAL STRESSES; LATTICE STRAINS; LAYER THICKNESSES; MULTILAYER COATINGS; PEAK WIDTHS; PREFERRED ORIENTATIONS; SUBSTRATE CURVATURES; TI ATOMS; TIN LAYERS; X-RAY DIFFRACTIONS;

COATINGS;

EID: 56349137772     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3006136     Document Type: Article

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