Micro vertical comb actuators by selective stiction process

Sensors and Actuators, A: Physical

Volumn 127, Issue 2, 2006, Pages 248-254

  Kim, Jongbaeg ^a   Christensen, Dane ^b   Lin, Liwei ^b  

^a Yonsei University   (South Korea)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuator; Scanning mirror; Stiction; Vertical comb

Indexed keywords

CAPACITORS; MANUFACTURE; MICROACTUATORS; MICROSTRUCTURE; NATURAL FREQUENCIES; OPTICAL SWITCHES; REGULATORY COMPLIANCE; SCANNING; SILICON; STICTION; VOLTAGE DISTRIBUTION MEASUREMENT;

MECHANICAL SPRING; PROTOTYPE MICROACTUATORS; SCANNING MIRROR; SELF-ALIGNED COMB SETS; SINGLE-CRYSTAL SILICON; STICTION PLATE; UNPACKAGED ACTUATOR; UNWANTED COMPLIANCES; UNWARRANTED MOTION; VERTICAL COMB;

ACTUATORS;

EID: 33644924352     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.08.035     Document Type: Article

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