A simple method for measuring the thermal diffusivity of surface-micromachined polysilicon thin films

Journal of Micromechanics and Microengineering

Volumn 16, Issue 5, 2006, Pages 981-985

  Huang, Qing An ^a   Xu, Gaobin ^a   Qi, Lina ^a   Li, Weihua ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT EXCHANGERS; HEAT TRANSFER; MATHEMATICAL MODELS; MICROMACHINING; THERMAL DIFFUSION; THIN FILMS;

DIGITAL OSCILLOSCOPE; SURFACE-MICROMACHINED POLYSILICON THIN FILMS; THERMAL DIFFUSIVITY;

POLYSILICON;

EID: 33744458458     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/5/015     Document Type: Article

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