A nodal analysis method for simulating the behavior of electrothermal microactuators

Microsystem Technologies

Volumn 14, Issue 1, 2008, Pages 119-129

  Li, Ren Gang ^a   Huang, Qing An ^a   Li, Wei Hua ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MEMS; MICROMACHINING; SCHEMATIC DIAGRAMS; THERMAL CONDUCTIVITY;

AXIAL STRESS; ELECTROTHERMAL MICROACTUATORS; NODAL ANALYSIS; SIMULATION DATA;

MICROACTUATORS;

EID: 34547842550     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0406-1     Document Type: Article

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