Pulsed i-PVD of dielectric nanodot arrays using a nanoporous template

Plasma Processes and Polymers

Volumn 6, Issue 3, 2009, Pages 161-169

  Zhong, Xiaoxia ^a   Wu, Xiaochen ^a   Ostrikov, Kostya ^b,c  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b CSIRO   (Australia)

^c UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Ionic physical vapor deposition; Monte carlo simulation; Nanodots; Nanofabrication; ZnO

Indexed keywords

IONIC PHYSICAL VAPOR DEPOSITION; MONTE CARLO SIMULATION; NANODOTS; NANOFABRICATION; ZNO;

ELECTRIC POTENTIAL; NANOPORES; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; SEMICONDUCTING ZINC COMPOUNDS; VAPORS; ZINC OXIDE;

MONTE CARLO METHODS;

EID: 67651205744     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200800129     Document Type: Article

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