Ion current distribution during deposition of dielectric material using an insulating porous alumina template

Journal of Physics D: Applied Physics

Volumn 40, Issue 24, 2007, Pages 7766-7770

  Yuan, Luqi ^a   Zhong, Xiaoxia ^a   Shu, Qiwei ^a   Wu, Xiaochen ^a   Xia, Yuxing ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; COMPUTER SIMULATION; ELECTRIC CURRENTS; IONS; PLASMA DENSITY; POROUS MATERIALS;

ION CURRENT DISTRIBUTION; ION VELOCITY; POROUS ALUMINA;

DIELECTRIC MATERIALS;

EID: 36749005757     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/24/025     Document Type: Article

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