SCOPUS 정보 검색 플랫폼

Volumn 92, Issue 22, 2008, Pages

Nanopore processing in dielectric materials and dielectric template-assisted nanoarray synthesis: Using pulsed bias to enhance process throughput and precision

(3) Wu, Xiaochen a Zhong, Xiaoxia a Ostrikov, Kostya b,c

a SHANGHAI JIAO TONG UNIVERSITY (China)

b UNIVERSITY OF SYDNEY (Australia)

c CSIRO (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; COMPUTER SIMULATION; DEPOSITS; ELECTRONS; IONS; NANOPORES; NANOSTRUCTURED MATERIALS; PIGMENTS; SURFACE CHARGE; SURFACES; THROUGHPUT;

(1 1 0) SURFACE; AMERICAN INSTITUTE OF PHYSICS (AIP); DYNAMIC CHARGES; ION CONDENSATION; ION DEPOSITION; MULTI SCALING; NANO ARRAYS; NANO PORES; NANO-ARRAYS; NANO-MATERIALS; NANODOTS (ND); NANOPOROUS TEMPLATES; NUMERICAL SIMULATIONS; POROUS DIELECTRICS; PROCESS THROUGHPUT; PULSED BIASING; SUBSTRATE SURFACES; SYNTHESIS (OF CHIRAL IONIC LIQUIDS);

DIELECTRIC MATERIALS;

EID: 44849138358 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2928219 Document Type: Article

Times cited : (14)

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