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Volumn 60, Issue 8, 2006, Pages 1019-1022
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Fabrication of Si nanodot arrays by plasma enhanced CVD using porous alumina templates
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
MORPHOLOGY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POROUS MATERIALS;
SILICON;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
DEPOSITION MECHANISM;
NANODOT ARRAYS;
PHOTOLUMINESCENCE SPECTRA;
NANOSTRUCTURED MATERIALS;
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EID: 30644457751
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2005.10.066 Document Type: Article |
Times cited : (14)
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References (15)
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