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Volumn 60, Issue 8, 2006, Pages 1019-1022

Fabrication of Si nanodot arrays by plasma enhanced CVD using porous alumina templates

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 30644457751     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2005.10.066     Document Type: Article
Times cited : (14)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.