SCOPUS 정보 검색 플랫폼

Chemical Vapor Deposition

Volumn 15, Issue 4-6, 2009, Pages 77-90

Overview of strategies for the CVD of organic films and functional polymer layers

(2) Sreenivasan, Ramaswamy a Gleason, Karen K a

a Massachusetts Institute of Technology Cambridge (United States)

Author keywords

iCVD; oCVD; PECVD; Polymer thin film; VDP

Indexed keywords

ICVD; OCVD; PECVD; POLYMER THIN FILM; VDP;

FUNCTIONAL POLYMERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTIC FILMS; POLYMER FILMS; POLYMERIZATION; TERMINOLOGY; THIN FILM DEVICES; THIN FILMS; VAPORS;

POLYMERS;

EID: 67650324661 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.200800040 Document Type: Review

Times cited : (71)

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