Integration of reactive polymeric nanofilms into a low-power electromechanical switch for selective chemical sensing

Journal of Microelectromechanical Systems

Volumn 18, Issue 1, 2009, Pages 97-102

  Arora, William J ^a,b   Tenhaeff, Wyatt E ^c   Gleason, Karen K ^c   Barbastathis, George ^c  

^a USA   (United States)

^b MC10 Inc   (United States)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Chemical vapor deposition (CVD); Microsensors; Thin films; Three dimensional nanomanufacturing

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL REACTIONS; CHEMICAL SENSORS; ELECTROCHEMICAL SENSORS; ELECTROMECHANICAL DEVICES; GRAFTING (CHEMICAL); MICROSENSORS; NANOCANTILEVERS; NITRIDES; POLYMER FILMS; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON NITRIDE; SYNTHESIS (CHEMICAL); THIN FILMS; THREE DIMENSIONAL; VAPORS;

ANALYTE; CANTILEVER DEFLECTIONS; CHEMICAL SENSING; CHEMICAL SENSING DEVICES; CHEMICAL VAPORS; CHEMICAL-VAPOR DEPOSITION (CVD); CROSS-LINKING DENSITIES; DEPOSITION PROCESS; ELECTROMECHANICAL SWITCHES; HEXYLAMINE; LOW-POWER; MICRO ELECTRO MECHANICALS; MICRO-CANTILEVERS; NANO-FILMS; ORDERS OF MAGNITUDES; REACTIVE COPOLYMERS; RESPONSE TIME; STRESS FORMATIONS; THREE-DIMENSIONAL NANOMANUFACTURING; VAPOR-PHASE;

CHEMICAL VAPOR DEPOSITION;

EID: 60449108951     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2008529     Document Type: Article

References (20)

1. W. E. Tenhaeff and K. K. Gleason, "Initiated and oxidative chemical vapor deposition of polymeric thin films: ICVD and oCVD," Adv. Funct. Mater., vol. 18, no. 7, pp. 979-992, Apr. 2008.
2. J. Janata and M. Josowicz, "Conducting polymers in electronic chemical sensors," Nat. Mater., vol. 2, no. 1, pp. 19-24, Jan. 2003.
3. D. Rivera, M. K. Alam, C. E. Davis, and C. K. Ho, "Characterization of the ability of polymeric chemiresistor arrays to quantitate trichloroethylene using partial least squares (PLS): Effects of experimental design, humidity, and temperature," Sens. Actuators B, Chem., vol. 92, no. 1/2, pp. 110-120, Jul. 2003.
4. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, "Cantilever transducers as a platform for chemical and biological sensors," Rev. Sci. Instrum., vol. 75, no. 7, pp. 2229-2253, Jul. 2004.
5. F. M. Battiston, J. P. Ramseyer, H. P. Lang, M. K. Baller, C. Gerber, J. K. Gimzewski, E. Meyer, and H. J. Guntherodt, "A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout," Sens. Actuators B, Chem. vol. 77, no. 1/2, pp. 122-131, Jun. 2001.
6. J. D. Adams, G. Parrott, C. Bauer, T. Sant, L. Manning, M. Jones, B. Rogers, D. McCorkle, and T. L. Ferrell, "Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array," Appl. Phys. Lett., vol. 83, no. 16, pp. 3428-3430, Oct. 2003.
7. N. Abedinov, P. Grabiec, T. Gotszalk, T. Ivanov, J. Voigt, and I. W. Rangelow, "Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 19, no. 6, pp. 2884-2888, Nov./Dec. 2001.
8. D. R. Baselt, B. Fruhberger, E. Klaassen, S. Cemalovic, C. L. Britton, S. V. Patel, T. E. Mlsna, D. McCorkle, and B.Warmack, "Design and performance of a microcantilever-based hydrogen sensor," Sens. Actuators B, Chem., vol. 88, no. 2, pp. 120-131, Jan. 2003.
9. S. Singamaneni, M. C. LeMieux, H. P. Lang, C. Gerber, Y. Lam, S. Zauscher, P. G. Datskos, N. V. Lavrik, H. Jiang, R. R. Naik, T. J. Bunning, and V. V. Tsukruk, "Bimaterial microcantilevers as a hybrid sensing platform," Adv. Mater., vol. 20, no. 4, pp. 653-680, Feb. 2008.
10. W. J. Arora, A. J. Nichol, H. I. Smith, and G. Barbastathis, "Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges," Appl. Phys. Lett., vol. 88, no. 5, p. 053 108, Jan. 2006.
11. W. J. Arora, S. Sijbrandij, L. Stern, J. Notte, H. I. Smith, and G. Barbastathis, "Membrane folding by helium ion implantation for three-dimensional device fabrication," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 25, no. 6, pp. 2184-2187, Nov. 2007.
12. A. J. Nichol, P. S. Stellman, W. J. Arora, and G. Barbastathis, "Two-step magnetic self-alignment of folded membranes for 3D nanomanufacturing," Microelectron. Eng., vol. 84, no. 5-8, pp. 1168-1171, May-Aug. 2007.
13. W. E. Tenhaeff and K. K. Gleason, "Initiated chemical vapor deposition of alternating copolymers of styrene and maleic anhydride," Langmuir vol. 23, no. 12, pp. 6624-6630, Jun. 2007.
14. T. Gao, E. S. Tillman, and N. S. Lewis, "Detection and classification of volatile organic amines and carboxylic acids using arrays of carbon black-dendrimer composite vapor detectors," Chem. Mater., vol. 17, no. 11, pp. 2904-2911, May 2005.
15. K. I. Oberg, R. Hodyss, and J. L. Beauchamp, "Simple optical sensor for amine vapors based on dyed silica microspheres," Sens. Actuators B, Chem., vol. 115, no. 1, pp. 79-85, May 2006.
16. K. Chan and K. K. Gleason, "Initiated chemical vapor deposition of linear and cross-linked poly(2-hydroxyethyl methacrylate) for use as thin-film hydrogels," Langmuir, vol. 21, no. 19, pp. 8930-8939, Sep. 2005.
17. M. Wen, L. E. Scriven, and A. V. McCormick, "Differential scanning calorimetry and cantilever deflection studies of polymerization kinetics and stress in ultraviolet curing of multifunctional (meth)acrylate coatings," Macromolecules, vol. 35, no. 1, pp. 112-120, Jan. 2002.
18. S. Baxamusa and K. K. Gleason, submitted for publication.
19. G. Odian, Principles of Polymerization, 4th ed. Hoboken, NJ: Wiley, 2004.
20. B. C. Trivedi and B. M. Culbertson, Maleic Anhydride. New York: Plenum, 1982.