Additively patterned polymer thin films by photo-initiated chemical vapor deposition (piCVD)

Chemistry of Materials

Volumn 19, Issue 24, 2007, Pages 5836-5838

  O'Shaughnessy, W Shannan ^a   Baxamusa, Sal ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL MICROGRAPH; PATTERNED FILMS; PHOTO-INITIATED CHEMICAL VAPOR DEPOSITION (PICVD);

ABSORPTION; CHEMICAL VAPOR DEPOSITION; MONOMERS; POLYMERS;

THIN FILMS;

EID: 36949040831     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm071381j     Document Type: Article

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