Modeling vapor deposition of low-K polymers: Parylene and polynaphthalene

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 266-274

  Rogojevic, Svetlana ^a   Moore, James A ^b   Gill, William N ^a  

^a Rensselaer Polytechnic Institute   (United States)

^b Rensselaer Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033475959     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581544     Document Type: Article

References (16)

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