Radiofrequency Plasma Sources for Semiconductor Processing

Advanced Plasma Technology

Volumn , Issue , 2008, Pages 99-115

  Chen, Francis F ^a  

^a University of California   (United States)

Author keywords

Capacitively coupled plasmas; Inductively coupled plasmas; Radiofrequency plasma sources; Semiconductor processing

Indexed keywords

EID: 67650308642     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527622184.ch6     Document Type: Chapter

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