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Plasma Sources Science and Technology

Volumn 10, Issue 2, 2001, Pages 236-249

Design and performance of distributed helicon sources

(3) Chen, Francis F a Evans, John D a Tynan, George R b,c

a UNIVERSITY OF CALIFORNIA (United States)

b Trikon Technologies Inc (United States)

c UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LEVELS; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMAS; SUBSTRATES;

HELICON SOURCES; HIGH DENSITY PLASMA;

PLASMA SOURCES;

EID: 0035331695 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/10/2/313 Document Type: Article

Times cited : (42)

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