Design, identification and control of a fast nanopositioning device

Proceedings of the American Control Conference

Volumn 3, Issue , 2002, Pages 1966-1971

  Salapaka, S ^a   Sebastian, A ^b   Cleveland, J P ^c   Salapaka, M V ^b  

^a University of California   (United States)

^b IOWA STATE UNIVERSITY   (United States)

^c United States   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CONTROL SYSTEM SYNTHESIS; IDENTIFICATION (CONTROL SYSTEMS); NONLINEAR CONTROL SYSTEMS; OPTIMAL CONTROL SYSTEMS; PIEZOELECTRIC DEVICES; SENSORS;

LINEAR VARIABLE DIFFERENTIAL TRANSFORMER SENSOR; PIEZOELECTRIC ACTUATOR;

TWO TERM CONTROL SYSTEMS;

EID: 0036346682     PISSN: 07431619     EISSN: None     Source Type: Journal    
DOI: 10.1109/ACC.2002.1023923     Document Type: Article

References (11)

1. Research on systems for measurements of CCD parameters
2. High-bandwidth macro/microactuation for hard disk drive
3. Novel alignment system for imprint lithography
4. New tools for structural testing: Piezoelectric impact hammers and acceleration rate sensors
5. Automated, integrated modules for fluid handling, thermal cycling and purification of dna samples for high throughput sequencing and analysis
6. Application of capacitor insertion method to scanning tunneling microscopes
7. Optical scan-correction system applied to atomic force microscopy
8. Piezoelectric scanners for atomic force microscopes: Design of lateral sensors, identification and control
9. Creep, hysteresis and vibration compensation for piezoactuators: Atomic force microscopy application