Feedback control implementation for AFM contact-mode scanner

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 617-621

  Zhang, Wenlin ^a,b   Miao, Lei ^a   Zheng, Yunhui ^a,b   Dong, Zaili ^a   Xi, Ning ^a,c  

^a SHENYANG INSTITUTE OF AUTOMATION   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c Michigan State University   (United States)

Author keywords

AFM; Hysteresis; Nano manipulation; Preisach model

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPE; CONTROL IMPLEMENTATION; CONTROL SCHEMES; EMBEDDED CONTROLS; FEED-FORWARD LOOP; FEEDBACK-CONTROL SYSTEMS; FUTURE RESEARCH; HYSTERESIS; HYSTERESIS EFFECTS; INTERNATIONAL CONFERENCES; MOLECULAR SYSTEMS; NANO MANIPULATION; NANO MANIPULATION SYSTEMS; NANO-RESEARCH; NANOMETER RESOLUTIONS; NON-LINEAR CHARACTERISTICS; PID FEEDBACK; PIEZO CERAMICS; PIEZO-CERAMIC ACTUATORS; PREISACH MODEL; PREISACH MODELING; SAMPLE SURFACES; TEST BEDS;

ACTUATORS; ADAPTIVE CONTROL SYSTEMS; ATOMIC FORCE MICROSCOPY; EXPERIMENTS; EXTREME ULTRAVIOLET LITHOGRAPHY; FEEDBACK CONTROL; MANIPULATORS; MICROMANIPULATORS; NONMETALS; PIEZOELECTRIC ACTUATORS; RESEARCH; ROBOT APPLICATIONS; SCANNING; SILICON; STANDARDS;

IMAGING TECHNIQUES;

EID: 50249127302     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484408     Document Type: Conference Paper

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