Kinematics modeling and system errors analysis for an AFM based nano manipulator

2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)

Volumn 3, Issue , 2004, Pages 1581-1586

  Tian, Xiaojun ^a,d   Xi, Ning ^a,b   Wang, Yuechao ^a   Dong, Zaili ^a   Li, Wenjung ^a,c  

^a SHENYANG INSTITUTE OF AUTOMATION   (China)

^b Michigan State University   (United States)

^c CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^d INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; ERROR ANALYSIS; IMAGING SYSTEMS; KINEMATICS; NANOTECHNOLOGY; PIEZOELECTRICITY; SCANNING;

NANOMANIPULATORS; PIEZOELECTRIC CONSTANT; SCANNERS; VERTICAL CROSS COUPLING ERRORS;

MANIPULATORS;

EID: 21244463534     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. G. Binnig, C. F. Quate, and C. Gerber, "Atomic force microscope", Physical Review Letters, vol. 56, no. 9, pp. 930-933, 1986,.
2. R. Luthi, E. Meyer, H. Haefke, L. Howald, W. Gutmannsbauer, and H.-J. Guntherodt, "Sledtype motion on the nanometer scale: Determination of dissipation and cohesive energies of c60", Science, vol. 266, pp. 1979-1981, 1994.
3. D. M. Schaefer, R. Reifenberger, A. Patil, and R. P. Andres, "Fabrication of two-dimensional arrays of nanometer-size clusters with the atomic force microscope", Applied Physics Letters, vol. 66, pp. 1012-1014, 1995.
4. T. Junno, K. Deppert, L. Montelius, and L. Samuelson, "Controlled manipulation of nanoparticles with an atomic force microscope", Applied Physics Letters, vol. 66, no. 26, pp. 3627-3629, 1995.
5. G. Binnig and D. P. E. Smith, "Single-tube three-dimensional scanner for scanning tunneling microscopy", Review of Scientific Instruments, vol. 57, no. 8, pp. 1688-1689,1986.
6. J. F. Jørgensen, L. L. Madsen, J. Gamaes, K. Cameiro, K. Schaumburg, "Calibration, drift elimination and molecular structure analysis", Journal of Vacuum Science and Technology, vol. B12, no.3, pp. 1698-1701, 1994.
7. R. Durselen, U. Grunewald, W. Preuss, "Calibration and applications of a high-precision piezo scanner for nanometrology", Journal of Scanning Mcroscopies, vol. 17, no. 2, pp. 91-96, 1995.
8. S. Ito, "Linearity correction systems for the image distortion in atomic force microscope", in Proceedings of the SICE Annual Conference, pp. 927-930, 1994.
9. J. Akila, S. S. Wadhwa, "Correction for nonlinear behavior of piezoelectric tube scanners used in scanning tunneling and atomic force microscopy", Review of Scientific Instruments, vol. 66, no. 3, pp. 2517, 1995.
10. O. M. El Rifai, K. Youcef-Toumi, "Coupling in piezoelectric tube scanners used in scanning probe microscopes", in Proceedings of the American Control Conference, vol. 4, pp. 3251-3255, 2001.
11. G. Schitter, A. Stemmer, "Model based signal conditioning for high-speed atomic force and friction force microscopy", Microelectronic Engineering, vol. 67-68, pp. 938-944, June, 2003
12. C. Wei, H. H. Zhang, L. Tao, W. J. Li, and H. M. Shi, "A circular arc bending model of piezoelectric tube scanners", Review of Scientific Instruments, vol. 67, no. 6, pp.2286, 1996.
13. J. A. Gallego-Juarez, "Piezoelectric ceramics and ultrasonic transducers", Journal of Physics E: Scientific Instruments, vol. 22, pp. 804-816, 1989.