Projection-based iterative learning control for wafer scanner systems

IEEE/ASME Transactions on Mechatronics

Volumn 14, Issue 3, 2009, Pages 388-393

  Mishra, Sandipan ^a   Tomizuka, Masayoshi ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Iterative learning control; Precision motion control; Subspace projection; Wafer stage control

Indexed keywords

BASIS FUNCTIONS; CONSTANT VELOCITIES; CONTROL INPUTS; ERROR SIGNAL; FORCE RIPPLE; FREQUENCY-DOMAIN FILTERING; ITERATIVE LEARNING CONTROL; ITERATIVE LEARNING CONTROLLER; PHASE MISMATCH; PRECISION CONTROL; PRECISION MOTION CONTROL; STABILITY AND CONVERGENCE; STRUCTURAL INFORMATION; SUBSPACE PROJECTION; WAFER SCANNER; WAFER STAGE; WAFER STAGE CONTROL;

EDUCATION; INTERFERENCE SUPPRESSION; LEARNING ALGORITHMS; LEARNING SYSTEMS; MOTION CONTROL; MOTION PLANNING;

TWO TERM CONTROL SYSTEMS;

EID: 67650165267     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2008.2007302     Document Type: Article

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