Exploiting Iterative Learning Control for Input Shaping, with Application to a Wafer Stage

Proceedings of the American Control Conference

Volumn 6, Issue , 2003, Pages 4811-4815

  Dijkstra, B G ^a   Bosgra, O H ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; ITERATIVE METHODS; MATRIX ALGEBRA;

OPTIMAL TRACKING;

LEARNING SYSTEMS;

EID: 0142230994     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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2. P.H. Meckl and W.P. Seering. Experimental evaluation of shaped inputs to reduce vibration for a cartesian robot. Transactions of the ASME, Journal of Dynamic Systems, Measurement and Control, 112:159-165, June 1990.
3. W.E. Singhose and N.C. Singer. Effects of input shaping on two-dimensional trajectory following. IEEE Transactions on Robotics and Automation, 12(6):881-887, 1996.
4. Roberto Kinceler and Peter H. Meckl. Corrective input shaping for a flexible-joint manipulator. American Control Conference, pages 1335-1339, June 1997.
5. Edwin Hou Lucy Y. Pao, Timothy N. Chang. Input shaper designs for minimizing the expected level of residual vibration in flexible structures. Proceedings of the American Control Conference, pages 3542-3546, 1997.
6. Marc Bodson. An adaptive algorithm for the tuning of two input shaping methods. Automatica, 34(6):771-776, 1998.
7. Branko G. Dijkstra and Okko H. Bosgra. Extrapolation of optimal lifted system ILC solution, with application to a waferstage. American Control Conference, May 2002.
8. Branko G. Dijkstra and Okko H. Bosgra. Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage. Conference on Control Automation, September 2002.
9. Branko G. Dijkstra and Okko H. Bosgra. Convergence design considerations of low order q-ILC for closed loop systems, implemented on a high precision wafer stage. Conference on Decision and Control, December 2002.
10. Rob Tousain and Eduard Van der Meché. Design strategies for iterative learning control based on optimal control. Conference on Decision and Control, 40:4463-4468, December 2001.
11. Won Cheol Kim, In Sik Chin, Kwang Soon Lee, and Jinhoon Choi. Analysis and reduced-order design of quadratic criterion-based iterative learning control using singular value decomposition. Computers and Chemical Engineering, 24:1815-1819, 2000.