Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system

International Journal of Control

Volumn 73, Issue 10, 2000, Pages 968-979

  De Roover, Dick ^a   Bosgra, Okko H ^b  

^a SC Solutions   (United States)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

HEURISTIC METHODS; ITERATIVE METHODS; MATHEMATICAL MODELS; ROBUSTNESS (CONTROL SYSTEMS);

ROBUST MULTIVARIABLE ITERATIVE LEARNING CONTROLLERS;

LEARNING SYSTEMS;

EID: 0034632136     PISSN: 00207179     EISSN: None     Source Type: Journal    
DOI: 10.1080/002071700405923     Document Type: Article

References (20)

1. ∞ approach to linear iterative learning control design. International Journal of Adaptive Control and Signal Processing, 10, 767-781.
2. Arimoto, S., 1985, Mathematical theory of learning with applications to robot control. In Proceedings of the 4th Yale Workshop on Applications of Adaptive Systems, New Haven, CT, USA, pp. 379-388.
3. Arimoto, S., Kawamura, S., and Miyazaki, F., 1984, Bettering operation of robots by learning. Journal of Robotic Systems, 1, 123-140.
4. Balas, G., Doyle, J.C., Glover, K., packard, A., and Smith, R., 1991, μ-Analysis and Synthesis Toolbox. MUSYN Inc. and The MathWorks, Inc.
5. Bondi, P., Casalino, G., and Gambardella, L., 1988, On the iterative learning control theory for robotic manipulators. IEEE Journal of Robotics and Automation, 4, 14-22.
6. Callafon, R.A. De, 1998, Feedback Oriented Identification for Enhanced and Robust Control: A Fractional Approach Applied to a Wafer Stage. Delft University Press. PhD Thesis, Delft Univ. Techn., The Netherlands.
7. Callafon, R.A. De, Roover, D. De, and Van Den Hof, P.M.J., 1996, Multivariable least squares frequency domain identification using polynomial matrix fraction description. In Proceedings of the 35th IEEE Conference on Decision and Control, Kobe, Japan, pp. 2030-2035.
8. ∞ control problems. IEEE Transactions on Automatic Control, AC-34, 831-847.
9. ∞ synthesis of robust current error feedback learning control. Transactions on ASME Journal of Dynamic Systems, Measurement, and Control, 118, 341-346.
10. Kavli, T., 1992, Frequency domain synthesis of trajectory learning controllers for robot manipulators. Journal of Robotic Systems, 9, 663-680.
11. Liang, Y.-J., and Looze, D.P., 1993, Performance and robustness issues in iterative learning control. In Proceedings of the 32nd IEEE Conference on Decision and Control, San Antonio, Texas, pp. 1990-1995.
12. Moore, K.L., Dahleh, M., and Bhattacharyya, S.P., 1989, Iterative learning for trajectory control. In Proceedings of the 28th IEEE Conference on Decision and Control, Tampa, Florida, pp. 860-865.
13. moore, K.L., Dahleh, M., and Bhattacharyya, S.P., 1992, Iterative learning control: a survey and new results. Journal of Robotic Systems, 9, 563-594.
14. Owens, D.H., 1993, Iterative learning control using adaptive high gain feedback. In Proceedings of the 1993 European Control Conference, pp. 195-198.
15. ∞ approach to learning control systems. International Journal of Adaptive Control and Signal Processing, 4, 465-474.
16. ∞ approach. In Proceedings of the 35th IEEE Conference on Decision and Control, Kobe, Japan, pp. 3044-3049.
17. Roover, D. De., 1997, Motion Control of a Wafer Stage: A Design Approach for Speeding up IC Production. Delft University Press. PhD Thesis, Delft Univ. Techn., The Netherlands.
18. Roover, D. De, Bosgra, O.H., Sperling, F.B., and Steinbuch, M., 1996, High-performance motion control of a flexible mechanical servomechanism. Selected Topics in Identification Modelling and Control, 9, 69-78.
19. ∞ Control Problem: A State Space Approach. Ph.D. Thesis, Eindhoven Univ. Techn., The Netherlands.
20. Zhou, K., Doyle, J.C., and Glover, K., 1996, Robust and Optimal Control (New Jersey: Prentice Hall).