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Volumn 255, Issue 16, 2009, Pages 7403-7407
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Deposition of nanostructured crystalline and corrosion resistant alumina film on bell metal at low temperature by rf magnetron sputtering
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Author keywords
Adhesion; Corrosion; Crystalline alumina; Rf magnetron sputtering
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Indexed keywords
ADHESION;
ALUMINA;
ALUMINUM CORROSION;
ALUMINUM OXIDE;
CORROSION;
CORROSION RESISTANCE;
CRYSTALLINE MATERIALS;
MAGNETRON SPUTTERING;
PROTECTIVE COATINGS;
SPUTTER DEPOSITION;
TEMPERATURE;
X RAY DIFFRACTION ANALYSIS;
ADHESION PROPERTIES;
ALUMINIUM OXIDE FILMS;
CORROSION-RESISTANT;
RF REACTIVE MAGNETRON SPUTTERING;
RF-MAGNETRON SPUTTERING;
SURFACE CHARACTERISTICS;
SURFACE MICROSTRUCTURES;
SYSTEM CONDITIONS;
OXIDE FILMS;
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EID: 67349212627
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2009.04.008 Document Type: Article |
Times cited : (23)
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References (34)
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