Thermally driven piezoresistive cantilevers for shear-force microscopy

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1212-1215

  Woszczyna, M ^a   Gotszalk, T ^a   Zawierucha, P ^a   Zielony, M ^a   Ivanow, Tzv ^b   Ivanowa, K ^b   Sarov, Y ^b   Nikolov, N ^c   Mielczarski, J ^d   Mielczarska, E ^d   Rangelow, I W ^b  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^c Microsystems Ltd   (Bulgaria)

^d UNIVERSITÉ DE LORRAINE   (France)

Author keywords

Piezoresistive deflection detection; Shear force microscopy; Silicon cantilever; Thermal actuation

Indexed keywords

CALIBRATION PROCEDURES; EXPERIMENTAL SET-UP; HIGHLY ORIENTED PYROLYTIC GRAPHITES; MEASUREMENT SYSTEMS; MICRO PROBES; MICROTIP; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTIVE DEFLECTION DETECTION; SCANNING-PROBE MICROSCOPIES; SHEAR-FORCE MICROSCOPY; SILICON CANTILEVER; THERMAL ACTUATION; THERMAL DEFLECTIONS; THERMALLY DRIVEN; TOPOGRAPHY MEASUREMENTS;

ATOMIC FORCE MICROSCOPY; DEFLECTION (STRUCTURES); GRAPHITE; SURFACE TOPOGRAPHY;

NANOCANTILEVERS;

EID: 67349178119     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.043     Document Type: Article

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