Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 56-64

  Rangelow, Ivo W ^a   Shi, Feng ^a   Hudek, Peter ^a   Gotszalk, Teodor ^a   Grabiec, Piotr B ^a   Dumania, Piotr ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROMECHANICAL ETCH-STOP TECHNIQUES; PIEZORESISTIVE WHEATSTONE BRIDGE; SILICON CANTILEVER BEAMS;

INTEGRATED CIRCUITS; MICROSCOPIC EXAMINATION; PLASMA DEVICES; POLISHING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; SILICON ON INSULATOR TECHNOLOGY;

ETCHING;

EID: 0030398224     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)