Reactor modeling of magnetically enhanced capacitive RF discharge

IEEE Transactions on Plasma Science

Volumn 25, Issue 3, 1997, Pages 499-506

  Park, Jong Chul ^a   Kang, Bongkoo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

MERIE; Rf discharge; Sheath

Indexed keywords

ELECTRIC FIELDS; MAGNETIC FIELDS; MATHEMATICAL MODELS; PLASMA DENSITY; REACTIVE ION ETCHING;

MAGNETIC SHEATH EQUATION; MAGNETICALLY ENHANCED REACTIVE ION ETCHING; PARTICLE CONSERVATION EQUATION; POWER BALANCE EQUATION;

ELECTRIC DISCHARGES;

EID: 0031170676     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.597265     Document Type: Article

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