Diagnostics of magnetically enhanced RF discharges in methane, argon and methane-argon mixtures

Journal of Physics D: Applied Physics

Volumn 30, Issue 21, 1997, Pages 3000-3007

  Avtaeva, S V ^a   Mamytbekov, M Z ^a   Otorbaev, D K ^a  

^a Kyrgyz National Academy of Sciences   (Kyrgyzstan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; DEPOSITION; EMISSION SPECTROSCOPY; MAGNETIC FIELD EFFECTS; METHANE; MIXTURES; OPTICAL FILMS; PLASMA DIAGNOSTICS; PROBES; TEMPERATURE MEASUREMENT; THERMOCOUPLES;

DOUBLE LANGMUIR PROBES;

MAGNETOPLASMA;

EID: 0031558604     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/21/014     Document Type: Article

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