Micromechanical three-axial tactile force sensor for micromaterial characterisation

Microsystem Technologies

Volumn 7, Issue 4, 2001, Pages 171-174

  Butefisch S ^b   Buttgenbach S ^b   Kleine Besten, T ^a   Brand, U ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18044402418     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420000083     Document Type: Article

References (5)

1. Bütefisch S; Dauer S; Büttgenbach S (1999) Silicon three-axial tactile sensor for the investigation of micromechanical structures. Proc 9th Int Trade Fair and Conference for Sensors, Transducers & Systems (Sensor' 99), Vol. 2, pp. 321-326
2. Büttgenbach S (1994) Mikromechanik - Einführung in Technologie und Anwendung. Teubner, 2.ed., Stuttgart
3. Kleine-Besten T; Loheide S; Brand U; Bütefisch S; Büttgenbach S (1999) Development and characterization of new probes for dimensional metrology on microsystem components. Proc 1st Int Conf and General Meeting of the European Society for Precision Engineering and Nanotechnology, Vol. 2, pp. 387-390
4. Schwenke H; Weiskirch C; Kunzmann H (1999) Opto-taktiler Sensor zur 2D-und 3D-Messung kleiner Strukturen mit Koordinatenmeßgeräten, Technisches Messen 12/99, pp. 485-489
5. Dauer S; Büttgenbach S; Ehlert A (1998) Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling. Proc Eurosensors XII, 7-10