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Volumn , Issue , 2001, Pages 93-98

Micro force-Moment sensor with six-Degree of freedom

Author keywords

[No Author keywords available]

Indexed keywords

SOCIAL SCIENCES;

EID: 84958185327     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2001.965228     Document Type: Conference Paper
Times cited : (13)

References (16)
  • 1
    • 0034247264 scopus 로고    scopus 로고
    • A silicon-based shear force sensor: Development and characterization
    • Lin Wang, David J. Beebe, "A silicon-based shear force sensor: development and characterization". Sensors and Actuators A 84, pp33-44, 2000.
    • (2000) Sensors and Actuators a , vol.84 , pp. 33-44
    • Wang, L.1    Beebe, D.J.2
  • 2
    • 0031999497 scopus 로고    scopus 로고
    • Development and calibration of a sub- millimeter three-component force sensor
    • W.L.C.D. Mote, "Development and calibration of a sub- millimeter three-component force sensor". Sensors and Actuators A 65, pp88-94, 1998.
    • (1998) Sensors and Actuators A , vol.65 , pp. 88-94
    • Mote, W.L.C.D.1
  • 4
    • 0030645994 scopus 로고    scopus 로고
    • A flexible MEMS technology and its first application to shear stress sensor skin
    • F. Jiang, Y. Tai, et al, "A flexible MEMS technology and its first application to shear stress sensor skin", Proc. IEEE MEMS'97, 1997.
    • (1997) Proc. IEEE MEMS'97
    • Jiang, F.1    Tai, Y.2
  • 5
    • 0023543078 scopus 로고
    • A novel three-dimensional microstructure fabrication technique for a triaxial tactile sensor array
    • presented at
    • C.T. Yao, et al, "A novel three-dimensional microstructure fabrication technique for a triaxial tactile sensor array", presented at Proc. IEEE Micro Robots and Teleoperators Workshop, 1987.
    • (1987) Proc. IEEE Micro Robots and Teleoperators Workshop
    • Yao, C.T.1
  • 6
    • 0033874015 scopus 로고    scopus 로고
    • An integrated MEMS three-dimensional tactile sensor with large force range
    • T. Mei, et al, "An integrated MEMS three-dimensional tactile sensor with large force range", Sensors and Actuators A 80, pp 155-162, 2000.
    • (2000) Sensors and Actuators A , vol.80 , pp. 155-162
    • Mei, T.1
  • 9
    • 84958188458 scopus 로고
    • Japan
    • Ogata, et al, "Measuring Technology", No. 11, Vol.15, Japan, 1987.
    • (1987) Measuring Technology , vol.15 , Issue.11
    • Ogata1
  • 10
    • 84958156020 scopus 로고    scopus 로고
    • Closed-form force sensing of a 6-axis force transducer based on the stewart platform
    • C.G. Kang, "Closed-form force sensing of a 6-axis force transducer based on the Stewart platform", Sensors and Actuators A 2876, pp 1-7, 2001.
    • (2001) Sensors and Actuators A , vol.2876 , pp. 1-7
    • Kang, C.G.1
  • 12
    • 36849141789 scopus 로고
    • Young's modulus, shear modulus
    • J.J.Wortman et al, "Young's modulus, shear modulus ...", J. Appl. Phys., vol 36, No.1, pp 153-156, 1965.
    • (1965) J. Appl. Phys , vol.36 , Issue.1 , pp. 153-156
    • Wortman, J.J.1
  • 13
    • 0004171924 scopus 로고
    • John Wiley & Sons Inc
    • S.M. Sze, "Semiconductor Sensors", pp.160-185, John Wiley & Sons Inc., 1994.
    • (1994) Semiconductor Sensors , pp. 160-185
    • Sze, S.M.1
  • 14
    • 0023385874 scopus 로고
    • Graphical representation of the piezorcsistance coefficients in si shear coefficients in plane
    • July
    • Y. Kanda, "Graphical representation of the piezorcsistance coefficients in Si shear coefficients in plane", Japanese J. Appl. Phys., vol. 26, No. 7, pp.1031-1033, July 1987.
    • (1987) Japanese J. Appl. Phys , vol.26 , Issue.7 , pp. 1031-1033
    • Kanda, Y.1
  • 15
    • 34249846476 scopus 로고
    • Semiconducting stress transducers utilizing the transverse
    • Oct
    • W.G.Pfann and R.N. Thurston, "Semiconducting stress transducers utilizing the transverse ...", J. Appl. Phys., Vol.32, No.10, pp.2008-2019, Oct. 1961.
    • (1961) J. Appl. Phys , vol.32 , Issue.10 , pp. 2008-2019
    • Pfann, W.G.1    Thurston, R.N.2
  • 16
    • 0000023102 scopus 로고
    • Piezoresistive properties of silicon diffused layers
    • O.N. Tufte, E.L. Stelzer, "Piezoresistive properties of silicon diffused layers", J. Appl. Phys., vol.34, No.2, pp.313-318, 1962.
    • (1962) J. Appl. Phys , vol.34 , Issue.2 , pp. 313-318
    • Tufte, O.N.1    Stelzer, E.L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.