X-ray diffraction and electron paramagnetic resonance study of porous 6H-SiC

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 849-853

  Torchynska, T V ^a   Bratus, V ^b   Gomez, J Palacios ^a  

^a INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL TYPES; ELECTRON PARAMAGNETIC RESONANCES; EPR SPECTRUM; EPR STUDIES; G VALUES; LOW INTENSITIES; PEAK WIDTHS; POROUS LAYERS; POROUS SIC; REACTIVE IONS; ROOM TEMPERATURES; SIC POLYTYPES; X-RAY DIFFRACTIONS; XRD; XRD STUDIES;

DIFFRACTION; ELECTRON RESONANCE; ELECTRON SPIN RESONANCE SPECTROSCOPY; GRAPHITE; PARAMAGNETIC MATERIALS; PARAMAGNETIC RESONANCE; PARAMAGNETISM; PHASE INTERFACES; QUANTUM THEORY; SILICON CARBIDE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 64549125674     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3043462     Document Type: Article

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