Elasto-plastic characterisation of low-temperature plasma-deposited silicon nitride thin films using nanoindentation

International Journal of Surface Science and Engineering

Volumn 3, Issue 1-2, 2009, Pages 3-22

  Martyniuk, Mariusz ^a   Musca, Charles A ^a   Dell, John M ^a   Elliman, Robert G ^b   Faraone, Lorenzo ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Elasto plasticity; Hardness; MEMS; Micro electro mechanical systems; Nanoindentation; Silicon nitride; Thin films; Young's modulus

Indexed keywords

DEPOSITION; ELASTIC MODULI; ELASTOPLASTICITY; HARDNESS; MEMS; NANOINDENTATION; NITRIDES; SILICON NITRIDE; SURFACE ROUGHNESS; TEMPERATURE;

ATOMIC COMPOSITIONS; DEPOSITION TEMPERATURES; LOW TEMPERATURE PLASMAS; LOWER TEMPERATURES; MICRO ELECTRO MECHANICAL SYSTEM; SIGNIFICANT SURFACES; SILICON NITRIDE THIN FILMS; TEMPERATURE SENSITIVE;

THIN FILMS;

EID: 64249155231     PISSN: 1749785X     EISSN: 17497868     Source Type: Journal    
DOI: 10.1504/IJSURFSE.2009.024359     Document Type: Article

References (22)

1. Chang, H-Y., Meng, C-Y., Huang, C-W. and Lee, S-C. (2005) 'The low-temperature a-SiNx films with high impermeability and high optical gap with application to organic light-emitting diode', Journal of Applied Physics, Vol. 98, pp.84501-84505.
2. Dell, J.M., Winchester, K., Musca, C.A., Antoszewski, J. and Faraone, L. (2002) 'Variable MEMS-based inductors fabricated from PECVD silicon nitride', Conference on Optoelectronic and Microelectron Materials and Devices, IEEE, 11-13 December, Sydney, NSW, Australia.
3. Elliman, R.G., Timmers, H. and Weijers, T.D.M. (2004) 'Hydrogen detection with a gas ionization elastic recoil detector', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vols. 219-220, pp.410-414.
4. Fischer-Cripps, A.C. (2004) Nanoindentation, Springer-Verlag, New York.
5. Hughey, M.P. and Cook, R.F. (2005) 'Stress development kinetics in plasma-enhanced chemical-vapor-deposited silicon nitride films', Journal of Applied Physics, Vol. 97, pp.114914-114921.
6. Jung, Y-G., Lawn, B.R., Martyniuk, M., Huang, H. and Hu, X.Z. (2004) 'Evaluation of elastic modulus and hardness of thin films by nanoindentation', Journal of Materials Research, Vol. 19, pp.3076-3080.
7. Lee, C.C., Wang, C.M., Xu, C.L., Chen, J.Y., Chang, J.Y., Liao, Y.M. and Chi, G.C. (2004) 'Nano-structured diffractive optical elements on SiN/ sub X/membrane for UV-visible regime applications', Proceedings of the SPIE - The International Society for Optical Engineering; Nanoengineering: Fabrication, Properties, Optics, and Devices, Vol. 5515, 4-6 August, pp.170-179.
8. Liao, W-S., Lin, C-H. and Lee, S-C. (1994) 'Oxidation of silicon nitride prepared by plasma-enhanced chemical vapor deposition at low temperature', Applied Physics Letters, Vol. 65, pp.2229-2231.
9. Martyniuk, M. (2006) Low-Temperature Micro-Opto-Electro-Mechanical Technologies for Temperature Sensitive Substrates, School of Electrical, Electronic and Computer Engineering, University of Western Australia, Perth.
10. Martyniuk, M., Antoszewski, J., Walmsley, B.A., Musca, C., Dell, J.M., Jung, Y-G., Lawn, B.R., Huang, H. and Faraone, L. (2005a) 'Determination of mechanical properties of silicon nitride thin films using nanoindentation', Proceedings of the SPIE - The International Society for Optical Engineering; Defense and Security Symposium, Spaceborne Sensors II, Vol. 5798, May, pp.216-225.
11. Martyniuk, M., Martyniuk Antoszewski, J., Musca, C.A., Dell, J.M. and Faraone, L. (2006) 'Environmental stability and cryogenic thermal cycling of low-temperature plasma-deposited silicon nitride thin films', Journal of Applied Physics, Vol. 99, pp.53519-53521.
12. Martyniuk, M., Sewell, R.H., Musca, C.A., Dell, J.M. and Faraone, L. (2005b) 'Nanoindentation of HgCdTe prepared by molecular beam epitaxy', Applied Physics Letters, Vol. 87, pp.251905-251903.
13. Memmi, D., Foglietti, V., Cianci, E., Caliano, G. and Pappalardo, M. (2002) 'Fabrication of capacitive micromechanical ultrasonic transducers by low-temperature process', Sensors and Actuators A, Vol. A99, pp.85-91.
14. Mencik, J., Munz, D., Quandt, E., Weppelmann, E.R. and Swain, M.V. (1997) 'Determination of elastic modulus of thin layers using nanoindentation', Journal of Materials Research, Vol. 12, pp.2475-2484.
15. Musca, C.A., Antoszewski, J., Winchester, K.J., Keating, A.J., Nguyen, T., Silva, K.K.M.B.D., Dell, J.M., Faraone, L., Mitra, P., Beck, J.D., Skokan, M.R. and Robinson, J.E. (2005) 'Monolithic integration of an infrared photon detector with a MEMS-based tunable filter', IEEE Electron Device Letters, Vol. 26, pp.888-890.
16. Oliver, W.C. and Pharr, G.M. (2004) 'Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology', Journal of Materials Research, Vol. 19, pp.3-20.
17. Smith, D.L., Alimonda, A.S., Chen, C-C., Ready, S.E. and Wacker, B. (1990) 'Mechanism of SiN/sub x/H/sub y/deposition from NH/sub 3/-SiH/sub 4/plasma', Journal of the Electrochemical Society, Vol. 137, pp.614-623.
18. Soh, M.T.K., Savvides, N., Musca, C.A., Martyniuk, M. and Faraone, L. (2005) 'Local bonding environment of plasma deposited nitrogen-rich silicon nitride thin films', Journal of Applied Physics, Vol. 97, pp.93714-93721.
19. Thurn, J., Cook, R.F., Kamarajugadda, M., Bozeman, S.P. and Stearns, L.C. (2004) 'Stress hysteresis and mechanical properties of plasma-enhanced chemical vapor deposited dielectric films', Journal of Applied Physics, Vol. 95, pp.967-976.
20. Walmsley, B.A., Liu, Y., Hu, X.Z., Bush, M.B., Winchester, K.J., Martyniuk, M., Dell, J.M. and Faraone, L. (2005) 'Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films', Journal of Applied Physics, Vol. 98, pp.44904-44911.
21. Weijers, T.D.M., Elliman, R.G. and Timmers, H. (2004) 'Heavy ion elastic recoil detection analysis of silicon-rich silica films', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vols. 219-220, pp.680-685.
22. Winchester, K.J. and Dell, J.M. (2001) 'Tunable Fabry-Perot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer', Journal of Micromechanics and Microengineering Vol. 11, pp.589-594.