Heavy ion elastic recoil detection analysis of silicon-rich silica films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 680-685

  Weijers, T D M ^a   Elliman, R G ^a   Timmers, H ^b  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Elastic recoil detection; Ion beam analysis; Nanocrystals

Indexed keywords

CRYSTALS; ELASTICITY; ION BEAMS; NANOSTRUCTURED MATERIALS; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM THEORY; SILICA; SILICON COMPOUNDS;

ELASTIC RECOIL DETECTION; ION BEAM ANALYSIS; NANOCRYSTALS; SILICA FILMS;

NUCLEAR INSTRUMENTATION;

EID: 2442566471     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.142     Document Type: Conference Paper

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