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Volumn 2002-January, Issue , 2002, Pages 567-570
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Variable mems-based inductors fabricated from PECVD silicon nitride
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
FABRICATION;
MICROELECTRONICS;
MICROMACHINING;
SILICON;
SILICON NITRIDE;
DC BIAS VOLTAGE;
EDDY CURRENT-LOSS;
ELECTRICALLY TUNABLE;
MICRO ELECTROMECHANICAL SYSTEM (MEMS);
ON-CHIP INTEGRATION;
PECVD SILICON NITRIDE;
SILICON BULK MICROMACHINING;
SILICON PROCESSING;
MEMS;
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EID: 84952647107
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/COMMAD.2002.1237315 Document Type: Conference Paper |
Times cited : (14)
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References (6)
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