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Volumn 2002-January, Issue , 2002, Pages 567-570

Variable mems-based inductors fabricated from PECVD silicon nitride

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROELECTRONICS; MICROMACHINING; SILICON; SILICON NITRIDE;

EID: 84952647107     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COMMAD.2002.1237315     Document Type: Conference Paper
Times cited : (14)

References (6)
  • 4
    • 84952706390 scopus 로고    scopus 로고
    • H. W. Johnson, M. Graham, Englewood Cliffs, N.J. Prentice Hall, (1993)
    • H. W. Johnson, M. Graham, Englewood Cliffs, N.J. Prentice Hall, (1993)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.