Nano-structured diffractive optical elements on SiNX membrane for UV-visible regime applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5515, Issue , 2004, Pages 170-179

  Lee, Chien Chieh ^a   Wang, Chih Ming ^a   Xu, Che Lung ^a   Chen, Jing Yi ^a   Chang, Jenq Yang ^a   Liao, Yi Ming ^a   Chi, Gou Chung ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Diffractive optical elements; Microoptoelectromechanical systems; SiNx membrane; UV; Visible

Indexed keywords

DEPOSITION; ELECTROMAGNETIC WAVE DIFFRACTION; ELECTRON BEAM LITHOGRAPHY; FABRICATION; LIGHT POLARIZATION; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; NANOSTRUCTURED MATERIALS; OPTICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TENSILE PROPERTIES; ULTRAVIOLET RADIATION;

DIFFRACTIVE OPTICAL ELEMENT; MICROOPTOELECTROMECHANICAL SYSTEMS; SINX MEMBRANE; VISIBLE;

SILICON NITRIDE;

EID: 13244267023     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559296     Document Type: Conference Paper

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