Elastic modulus: A suitable quantity for characterization of thin films

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 962-970

  Schneider, Dieter ^a   Schultrich, Bernd ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Boron nitride films; Diamond like carbon films; Laser acoustic method; Non destructive testing thin films; Surface acoustic waves; Young's modulus

Indexed keywords

EID: 0000065824     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00317-4     Document Type: Article

References (17)

1. J. Robertson, in: R.E. Clausing et al. (Eds.), Diamond and Diamond-like Carbon Films, Plenum, New York, 1991, p. 37.
2. B. Schultrich, H.-J. Scheibe, G. Grandremy, D. Schneider, P. Siemroth, Thin Solid Films 253 (1994) 125.
3. H. Hollek, in: H. Fischmeister, H. Jehn (Eds.), Hartstoffschichten für die Verschleißminderung, DGM-Informationsgesellschaft: Oberursel 1987, pp. 25-44.
4. D. Schneider, H. Ollendorf, Th. Schwarz, Appl. Phys. A61 (1995) 277-284.
5. D. Schneider, Th. Schwarz, B. Schultrich, Thin Solid Films 219 (1992) 92.
6. H. Coufal, R. Grygier, P. Hess, A. Neubrand, J. Acoust. Soc. Am. 92 (1992) 2980.
7. W. Farnell, E.L. Adler, in: W.P. Mason, R.N. Thurston (Eds.), Physical Acoustics, Vol. IX, Academic Press, New York, 1972, p. 35.
8. S. Anders, A. Anders, C. Singh Bhatia, S. Raoux, D. Schneider, J. W. Ager, I. G. Brown, Application of Diamond Films and Related Materials, Third International Conference, A. Feldman et al. (Eds.), Gaithersburg, 1995, p. 809.
9. D. Schneider, Th. Schwarz, H.-J. Scheibe, M. Panzner, Thin Solid Films. 295 (1997) 107.
10. J. Scheibe, B. Schultrich, Thin Solid Films 246 (1994) 92.
11. Y. Lifshitz, G.D. Lempert, S. Rotter, I. Avigal, C. Uzan-Saguy, R. Kalish, Diamond Relat. Mater. 2 (1993) 285.
12. Y. Lifshitz, G.D. Lempert, E. Grossman, I. Avigal, C. Uzan-Saguy, R. Kalish, J. Kulik, D. Marton, J.W. Rabalais, Diamond Relat. Mater. 2 (1995) 318-323.
13. X. Jiang, M. Reichelt, B. Stritzker, J. Appl. Phys. 66 (1989) 5805.
14. B. Schultrich, H.-J. Scheibe, D. Schneider, D. Drescher, H. Ollendorf, Surf. Coat. Technol. to be published.
15. F. Stanglmeier, B. Lengeler, W. Weber, H. Göbel, M, Schuster, Acta Cryst. A48 (1992) 626.
16. Y. Lifshitz, G.D. Lempert, S. Rotter, I. Avigal, C. Uzan Saguy, R. Kalish, Diamond Relat, Mater. 2 (1993) 285.
17. R.F. Eggerton, Electron Energy Loss Spectroscopy in the Electron Microscopy, Plenum Press, New York, 1986.