A nano-indentation study on the plasticity length scale effects in LIGA Ni MEMS structures

Journal of Materials Science

Volumn 38, Issue 20, 2003, Pages 4137-4143

  Lou, J ^a   Shrotriya, P ^a   Buchheit, T ^b   Yang, D ^c   Soboyejo, W O ^a  

^a Princeton University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c Bruker Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; HARDNESS; MECHANICAL TESTING; MECHANICAL VARIABLES MEASUREMENT; METALLIC FILMS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; NICKEL; PLASTIC DEFORMATION; PLASTICITY; RESIDUAL STRESSES; STRAIN RATE;

ELASTIC PLASTIC DEFORMATION; NANOINDENTATION; PLASTICITY LENGTH SCALE EFFECTS; RESIDUAL INDENTATION DEPTH; SULFAMATE BATHS;

MICROELECTROMECHANICAL DEVICES;

EID: 0345015821     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026325505194     Document Type: Article

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