A buckling-based metrology for measuring the elastic moduli of polymeric thin films

Nature Materials

Volumn 3, Issue 8, 2004, Pages 545-550

  Stafford, Christopher M ^a   Harrison, Christopher ^a,d   Beers, Kathryn L ^a   Karim, Alamgir ^a   Amis, Eric J ^a   Vanlandingham, Mark R ^a,e   Kim, Ho Cheol ^b   Volksen, Willi ^b   Miller, Robert D ^b   Simonyi, Eva E ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

^d SCHLUMBERGER DOLL RESEARCH   (United States)

^e Mechanical Science   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; ELASTIC MODULI; ELECTROMAGNETIC WAVE DIFFRACTION; ELECTRONICS PACKAGING; FINITE ELEMENT METHOD; FOURIER TRANSFORMS; OPTICAL IMAGE STORAGE; PERMITTIVITY; PHASE SEPARATION; POISSON RATIO; POROSITY; THIN FILMS; VISCOELASTICITY; X RAYS;

DIELECTRIC COATINGS; DIFFRACTION PATTERNS; NANOSCALE POLYMER FILMS; POLYMERIC THIN FILMS;

PLASTIC FILMS;

POLYMER; POLYSTYRENE DERIVATIVE;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; COMPARATIVE STUDY; CRYSTALLOGRAPHY; ELASTICITY; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; STIMULATION; VALIDATION STUDY;

CRYSTALLOGRAPHY; ELASTICITY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; NANOTECHNOLOGY; PHYSICAL STIMULATION; POLYMERS; POLYSTYRENES; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY;

EID: 4344569742     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat1175     Document Type: Article

References (34)

1. Elshabini-Riad, A. A. R. & Barlow, F. D. Thin Film Technology Handbook (McGraw-Hill, New York, 1997).
2. Asif, S. A. S., Wahl, K. J. & Colton, R. I. Nanoindentation and contact stiffness measurement using force modulation with a capacitive load-displacement transducer. Rev. Sci. Instrum. 70, 2408-2413 (1999).
3. Van Landingham, M. R., Villarrubia, I. S., Guthrie, W. F. & Meyers, G. F. Nanoindentation of polymers: An overview. Macnmol. Symp. 167, 15-43 (2001).
4. Du, B. Y. et al. Nanostructure and mechanical measurement of highly oriented lamellae of melt-drawn HOPE by scanning probe microscopy. Mammolecula 33, 7521-7528 (2000).
5. Du, B. Y., Tsui, O. K. C., Zhang, Q. L. & He, T. B. Study of elastic modulus and yield strength of polymer thin films using atomic force microscopy. Langmuir 17, 3286-3291(2001).
6. Stafford, C. M., Harrison, C., Karim, A. & Amis, E. J. Measuring the modulus of polymer films by strain-induced bucking instabilities. Polymer Preprints 43, 1335 (2002).
7. Bowden, N., Brittain, S., Evans, A. G., Hutchinson, I. W. & Whitesides, G. M. Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer. Nature 393, 146-149 (1998).
8. Bowden, N., Huck, W. T. S., Paul, K. E. & Whitesides, G. M. The controlled formation of ordered, sinusoidal structures by plasma oxidation of an elastomeric polymer. Appl. Phys. Lett. 75, 2557-2559 (1999).
9. Biot, M. A. Bending of an infinite beam on an elastic foundation. J. Appl. Mech. A 4, 1-7 (1937).
10. Allen, H. G. Analysis and Design of Structural Sandwich Panels (Pergamon, New York, 1969).
11. Volynskii, A. L., Bazhenov, S., Lebedeva, O. V. & Bakeev, N. F. Mechanical buckling instability of thin coatings deposited on soft polymer substrates. J. Mater. Sci. 35, 547-554 (2000).
12. Groenewold, J. Wrinkling of plates coupled with soft elastic media. Physica A 298, 32-45 (2001).
13. Huang, R. in UT-MSSM Report No. 04/01 1-48 (Univ. Texas, Austin, 2004).
14. Meredith, J. C., Karim, A. & Amis, E. J. Combinatorial methods for investigations in polymer materials science. Mater. Res. Soc. Bull. 27, 330-335 (2002).
15. Lenhart, J. L. et al. Combinatorial methodologies offer potential for rapid research of photoresist materials and formulations. J. Vac. Sci. Technol. B 20, 704-709 (2002).
16. Meier, M. A. R., Hoogenboom, R. & Schubert, U. S. Combinatorial methods, automated synthesis and high-throughput screening in polymer research: The evolution continues. Macromol. Rapid Comm. 25, 21-33 (2004).
17. Schmatloch, S., Bach, H., van Benthem, R. & Schubert, U. S. High-throughput experimentation in organic coating and thin film research: State-of-the-art and future perspectives. Mocromol. Rapid Comm. 25, 95-107 (2004).
18. Cawse, J. N. Experimental strategies for combinatorial and high-throughput materials development. Acc. Chem. Res. 34, 213-221 (2001).
19. Brandrup, J., Immergut, E. H. & Grulke, E. A. (eds) Polymer Handbook (Wiley, New York, 1999).
20. Sears, J. K. & Darby, J. R. The Technology of Plasticizers (Wiley, New York, 1982).
21. Van Landingham, M. R. Review of instrumented indentation. J. Res. Natl Inst. Stan. 108, 249-265 (2003).
22. Wetzel, J. T. et al. Evaluation of material property requirements and performance of ultra-low dielectric constant insulators for inlaid copper metallization. IEDM Tech. Digest 73-75 (2001).
23. Miller, R. D. Device physics - In search of low-k dielectrics. Science 286, 421-423 (1999).
24. Volksen, W. et al. in Low Dielectric Constant Materials for IC Applications (eds Ho, P. S., Leu, J. & Lee, W. W.) 167-202 (Springer, New York, 2003).
25. Grill, A. et al. Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study. J. Appl. Phys. 94, 3427-3435 (2003).
26. Duffy, D. C., McDonald, J. C., Schueller, O. J. A. & Whitesides, G. M. Rapid prototyping of microfiuidic systems in poly(dimethylsiloxane). Anal. Chem. 70, 4974-4984 (1998).
27. Efimenko, K., Wallace, W. E. & Genzer, J. Surface modification of Sylgard-184 poly(dimethyl siloxane) networks by ultraviolet and ultraviolet/ozone treatment, J. Colloid Interface Sci. 254, 306-315 (2002).
28. Flannery, C. M., Wittkowski, T., Jung, K., Hillebrands, B. & Baklanov, M. R. Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy. Appl. Phys. Lett. 80, 4594-4596 (2002).
29. Phani, K. K. & Niyogi, S. K. Young modulus of porous brittle solids. J. Mater. Sci. 22, 257-263 (1987).
30. Knudsen, F. P. Effect of porosity on Young's modulus of alumina. J. Am. Ceram. Soc. 45, 94-95 (1962).
31. Huang, E. et al. Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering. Appl. Phys. Lett. 81, 2232-2234 (2002).
32. Hedstrom, J. A. et al. Pore morphologies in disordered nanoporous thin films. Lomgmuir 20, 1535-1538 (2004).
33. Roberts, A. P. & Garboczi, E. J. Elastic properties of model porous ceramics. J. Am. Ceram. Soc. 83, 3041-3048 (2000).
34. Meredith, J. C., Smith, A. P., Karim, A. & Amis, E. J. Combinatorial materials science for polymer thin-film dewetting. Macromolecules 33, 9747-9756 (2000).