Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 909-915

  Jenkins, Neil E ^a   DeFlores, Lauren P ^a   Allen, Jack ^a   Ng, Tse Nga ^a   Garner, Sean R ^b   Kuehn, Seppe ^a   Dawlaty, Jahan M ^a   Marohn, John A ^a  

^a Department of Molecular Biology and Genetics   (United States)

^b Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; EVAPORATION; HEAT TREATMENT; INTERFEROMETERS; MAGNETIC MOMENTS; MAGNETIZATION; NATURAL FREQUENCIES; ORGANIC ACIDS; PHOTOLITHOGRAPHY; SIGNAL TO NOISE RATIO; SILICON ON INSULATOR TECHNOLOGY;

ELECTRIC FORCE MICROSCOPY (EFM); INTEGRATED SUBNMICRON MAGNETIC TIPS; MAGNETIC RESONANCE FORCE MICROSCOPY (MRFM); THERMAL EVAPORATION;

MAGNETIC DEVICES;

EID: 3242695311     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1695336     Document Type: Article

References (47)

1. T. D. Stowe, T. W. Kenny, D. J. Thomson, and D. Rugar, Appl. Phys. Lett. 75, 2785 (1999).
2. Y. Martin, D. W. Abraham, and H. K. Wickramasinghe, Appl. Phys. Lett. 52, 1103 (1988).
3. W. Denk and D. W. Pohl, Appl. Phys. Lett. 59, 2171 (1991).
4. Y. Martin and H. K. Wickramasinghe, Appl. Phys. Lett. 50, 1455 (1987).
5. P. Grütter, Y. Liu, P. Leblanc, and U. Durig, Appl. Phys. Lett. 71, 279 (1997).
6. J. A. Marohn, R. Fainchtein, and D. D. Smith, Appl. Phys. Lett. 73, 3778 (1998).
7. B. C. Stipe, H. J. Mamin, T. D. Stowe, T. W. Kenny, and D. Rugar, Phys. Rev. Lett. 86, 2874 (2001).
8. G. A. Gibson and S. Schultz, J. Appl. Phys. 73, 4516 (1993).
9. C. Rossel et al., J. Appl. Phys. 79, 8166 (1996).
10. C. Lupien, B. Ellman, P. Grütter, and L. Taillefer, Appl. Phys. Lett. 74, 451 (1999).
11. D. Rugar, C. S. Yannoni, and J. A. Sidles, Nature (London) 360, 563 (1992).
12. D. Rugar et al., Science 264, 1560 (1994).
13. J. A. Sidles et al., Rev. Mod. Phys. 67, 249 (1995).
14. S. Hoen, O. Züger, C. S. Yannoni, H. J. Mamin, K. Wago, and D. Rugar, in Technical Digest of the 1994 Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina (Transducers Research Foundation, 1994), pp. 209-212.
15. K. Y. Yasumura et al., J. Microelectromech. Syst. 9, 117 (2000).
16. T. D. Stowe, K. Yasumura, T. W. Kenny, D. Botkin, K. Wago, and D. Rugar, Appl. Phys. Lett. 71, 288 (1997).
17. P. Streckeisen et al., Appl. Phys. A: Mater. Sci. Process. 66, S341 (1998).
18. J. L. Yang, T. Ono, and M. Esashi, Sens. Actuators, A 82, 102 (2000).
19. B. C. Stipe et al., Phys. Rev. Lett. 87, 277602 (2001).
20. SOITEC, Part 40008P.
21. K. N. Tu, Appl. Phys. Lett. 27, 221 (1975).
22. Thin Films - Interdiffusion and Reactions, edited by J. M. Poate, K. N. Tu, and J. W. Mayer (Wiley, New York, 1982), p. 359.
23. M. A. Douglas, U.S. Patent No. 4,855,017 (8 August 1989).
24. F. Lärmer and A. Schilp, German Patent No. 4,241,045 (26 May 1994).
25. A. A. Ayon, R. Braff, C. C. Lin, H. H. Sawin, and M. A. Schmidt, J. Electrochem. Soc. 146, 339 (1999).
26. A. A. Ayon, R. L. Bayt, and K. S. Breuer, Smart Mater. Struct. 10, 1135 (2001).
27. T. R. Albrecht, P. Grütter, D. Rugar, and D. P. E. Smith, Ultramicroscopy 42, 1638 (1992).
28. K. J. Bruland et al., Rev. Sci. Instrum. 70, 3542 (1999).
29. D. Rugar et al., Appl. Phys. A: Mater. Sci. Process. 72, S3 (2001).
30. J. L. Hutter and J. Bechhoefer, Rev. Sci. Instrum. 64, 1868 (1993).
31. American Institute of Physics Handbook, 3rd ed., edited by D. E. Gray (McGraw-Hill, New York, 1972).
32. K. E. Petersen, Proc. IEEE 70, 420 (1982).
33. S. Evoy, D. W. Carr, L. Sekaric, A. Olkhovets, J. M. Parpia, and H. G. Craighead, J. Appl. Phys. 86, 6072 (1999).
34. L. Sekaric et al., Appl. Phys. Lett. 81, 4455 (2002).
35. T. R. Albrecht, P. Grütter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991).
36. A. Aharoni, J. Appl. Phys. 83, 3432 (1998).
37. R. H. Kodama, S. A. Makhlouf, and A. E. Berkowitz, Phys. Rev. Lett. 79, 1393 (1997).
38. J. A. Marohn, R. Fainchtein, and D. D. Smith, J. Appl. Phys. 86, 4619 (1999).
39. J. G. Kempf and J. A. Marohn, Phys. Rev. Lett. 90, 087601 (2003).
40. T. D. Stowe, Ph.D. thesis, Stanford University, 2000.
41. H. J. Mamin, R. Budakian, B. W. Chui, and D. Rugar, Phys. Rev. Lett. 91, 207604 (2003).
42. S. R. Garner, S. Kuehn, J. Dawlaty, N. E. Jenkins, and J. A. Marohn, Appl. Phys. Lett. (submitted).
43. K. Wago, O. Zuger, R. Kendrick, C. S. Yannoni, and D. Rugar, J. Vac. Sci. Technol. B 14, 1197 (1996).
44. R. Subramanian, M. M. Lam, and A. G. Webb, J. Magn. Reson. 133, 227 (1998).
45. R. Verhagen et al., Phys. Chem. Chem. Phys. 1, 4025 (1999).
46. D. A. Seeber, J. H. Hoftiezer, and C. H. Pennington, Rev. Sci. Instrum. 71, 2908 (2000).
47. A. R. Champagne, A. J. Couture, F. Kuemmeth, and D. C. Ralph, Appl. Phys. Lett. 82, 1111 (2003).