Cantilever microbeams: Modelling of the dynamical behaviour and material characterization

Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004

Volumn , Issue , 2004, Pages 377-384

  Yahiaoui, Réda ^a   Bosseboeuf, Alain ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COMPOSITE MICROMECHANICS; COMPOSITION; ELASTIC MODULI; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OPTICAL SYSTEMS; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; THICKNESS MEASUREMENT; VIBRATION CONTROL;

IMPRECISION; MICROBEAMS; STRESS GRADIENTS; VIBRATION SPECTRUM;

CANTILEVER BEAMS;

EID: 3843082844     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

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