Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range

Journal of Micromechanics and Microengineering

Volumn 17, Issue 4, 2007, Pages 730-736

  Eklund, E Jesper ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; MICROSENSORS; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY; THERMAL CONDUCTIVITY; THERMAL EFFECTS;

IN-PLANE PIEZORESISTIVE ACCELEROMETER; PIEZORESISTIVE SENSORS; PIEZORESISTORS; SINGLE-MASK FABRICATION; TEMPERATURE COEFFICIENT OF SENSITIVITY (TCS);

ACCELEROMETERS;

EID: 34249080051     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/4/009     Document Type: Conference Paper

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