New bulk accelerometer for triaxial detection

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 105-108

  Plaza, J A ^a   Chen, Hong ^a   Esteve, J ^a   Lora Tamayo, Emilio ^a  

^a CSIC   (Spain)

Author keywords

BESOI; Non linearity; Piezoresistive; Triaxial accelerometers

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS;

TRIAXIAL ACCELEROMETERS;

ACCELEROMETERS;

EID: 0032047245     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01735-4     Document Type: Article

References (7)

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