A silicon micromachined shock accelerometer with twin-mass-plate structure

Sensors and Actuators, A: Physical

Volumn 107, Issue 1, 2003, Pages 50-56

  Wang, Zuankai ^a   Zong, Denggang ^a   Lu, Deren ^a   Xiong, Bin ^a   Li, Xinxin ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Accelerometer; Micromachining; Piezoresistive; Shock

Indexed keywords

FABRICATION; MICROMACHINING; PLATES (STRUCTURAL COMPONENTS); SILICON;

TWIN-MASS-PLATE STRUCTURES;

ACCELEROMETERS;

EID: 0041780948     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00270-X     Document Type: Article

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