A novel out-of-plane MEMS tunneling accelerometer

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 360-364

  Dong, Haifeng ^a   Jia, Yubin ^a   Hao, Yilong ^a   Shen, Sanmin ^b  

^a PEKING UNIVERSITY   (China)

^b NORTH UNIVERSITY OF CHINA   (China)

Author keywords

ICP; MEMS; Tunneling accelerometer

Indexed keywords

CHARACTERIZATION; ELECTRIC POTENTIAL; ELECTRON TUNNELING; ETCHING; FABRICATION; INDUCTIVELY COUPLED PLASMA; MICROELECTROMECHANICAL DEVICES;

MEMS; TUNNELING ACCELEROMETER; TUNNELING CURRENT; WET ETCHING;

ACCELEROMETERS;

EID: 17644416029     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.12.021     Document Type: Article

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