A novel CMOS out-of-plane accelerometer with fully differential gap-closing capacitance sensing electrodes

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1275-1280

  Wang, Chuanwei ^a   Tsai, Ming Han ^a   Sun, Chih Ming ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; MEMS; SIGNAL TO NOISE RATIO;

CMOS-MEMS; COMB-FINGER ELECTRODES; DIFFERENTIAL SENSING CIRCUITS; LINEAR ACCELEROMETERS;

ACCELEROMETERS;

EID: 34547588065     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/009     Document Type: Article

References (12)

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