Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz

Proceedings - IEEE Ultrasonics Symposium

Volumn 4, Issue , 2005, Pages 2136-2139

  Pang, Wei ^a   Zhang, Hao ^a   Yu, Hongyu ^a   Kim, Eun Sok ^a  

^a University of Southern California   (United States)

Author keywords

FBAR; Mason model; Second harmonic

Indexed keywords

ACOUSTIC WAVE VELOCITY; COMPUTER SIMULATION; MATHEMATICAL MODELS; OSCILLATORS (ELECTRONIC); PIEZOELECTRIC DEVICES; THERMODYNAMIC STABILITY;

MASON MODEL; PHASE NOISE; PIEZOELECTRIC LAYERS;

HARMONIC GENERATION;

EID: 33847164041     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603304     Document Type: Conference Paper

References (5)

1. R. C. Ruby, P. Bradley, Y. Oshmyansky, A. Chien, J.D. Larson III, "Thin Film Bulk Acoustic Resonators (FBAR) for Wireless Applications," IEEE Ultrasonics Symposium, 2001, pp. 813-821.
2. s, vs. Temperature for Mo/AlN FBAR resonators," IEEE Ultrasonics Symposium, 2002, pp. 939-943.
3. Y. Zhang, Z. Wang, J. David and N. Cheeke, "Resonant Spectrum Method to Characterize Piezoelectric Films in Composite Resonators," IEEE Trans. on Ultra., Ferro., and Freq. Cont., vol. 50, no. 3, 2003, pp. 321-333.
4. W. Pang, H. Zhang, S. Whangbo, and E.S. Kim, "High Q Film Bulk Acoustic Resonator from 2.4 to 5.1GHz,"IEEE International Micro Electro Mechanical Systems Conference, Maastricht, The Netherlands, January 25-29, 2004, pp. 805-808.
5. H. Zhang, J.J. Kim, W. Pang, H. Yu, and ES. Kim, "5GHz Low-phase-noise Oscillator Based on FBAR with Low TCF," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005.