Floating tip nanolithography

Nano Letters

Volumn 8, Issue 7, 2008, Pages 2017-2022

  Milner, Alexander A ^a   Zhang, Kaiyin ^a   Prior, Yehiam ^a  

^a WEIZMANN INSTITUTE OF SCIENCE   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

PULSED LASER APPLICATIONS;

AMBIENT CONDITIONS; ATOMIC FORCE MICROSCOPES; FIELD ENHANCEMENTS; FOCUSED FEMTOSECOND LASERS; HARD MATERIALS; HIGH QUALITY SURFACES; MATERIAL ABLATIONS; NANO WRITINGS; NONCONTACT; SPATIAL RESOLUTIONS;

SURFACES;

EID: 61449176832     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl801203c     Document Type: Article

References (21)

1. 2/Semiconductor Surfaces. Jpn. J. Appl. Pins. 1997, 36, 4057-4060.
2. Kirsanov, A.; Kiselev. A.; Stepanov, A.; Polushkin, N. Femtosecond laser-induced nanofabrication in the near-field of atomic force microscope tip. J. Appl. Phys. 2003. 94. 6822-6826.
3. Mamin, H. J.; Rugar, D. Thermomechanical Writing with an Atomic Force Microscope Tip. Appl. Phys. Lett. 1992, 61, 1003-1005.
4. Mamin, H. J. Thermal Writing Using a Heated Atomic Force Microscope Tip. Appl. Phys. Lett. 1996, 69, 433-435.
5. Chui, B. W. Low-Stiffness Silicon Cantilever with Integrated Heaters and Piezoresistive Sensors for High-Density Data Storage. J. Microelectromech. Syst. 1998. 7, 69-78.
6. Hammiche, A.; Reading, M.; Pollock, H. M.; Song, M.; Hourston. D. J. Localized thermal analysis using a miniaturized resistive probe. Rev. Sci. Instrum. 1996, 67, 4268-4273.
7. Yang, F.; Wornyo, E.; Gall, K.; King, W. P. Nanoscale indent formation in shape memory polymers using a heated probe tip. Nanotechnology 2007, 18, 285302.
8. King, W. P. Atomic force microscope cantilevers for combined thermomechanical data writing and reading. Appl. Phys. Lett. 2001. 78, 1300-1302.
9. Szoszkiewicz, R. High-Speed, Sub-15 nm Feature Size Thermochemical Nanolithography. Nano Lett. 2007, 7, 1064-1069.
10. Chimmalgi, A.; Choi, T. Y.; Grigoropoulos, C. P.; Komvopoulos, K. Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy. Appl. Phys. Lett. 2003. 82. 1146-1148.
11. Salaita, K.; Wang, Y.; Mirkin, C. A. Applications of dip-pen nanolithography. Nat. Nanotechnol. 2007, 2, 145-155, and references therein.
12. Hamann, H. F. Extinction near-field optical microscopy. Opt. Commun. 2003, 227, 1-13.
13. Protasenko, V. V.; Gallagher, A.; Nesbitt, D. J. Factors that influence confocal apertureless near-field scanning optical microscopy. Opt. Commun. 2004, 233, 45-56.
14. Gerton, J. M.; Wade, L. A.; Lessard, G. A.; Ma, Z.; Quake. S. R. Tip-Enhanced Fluorescence Microscopy at 10 Nanometer Resolution. Phys. Rev. Lett. 2004, 93, 18081.
15. Esteban, R.; Vogelgesang, R.; Kern, K. Tip-substrate interaction in optical near-field microscopy. Phys. Rev. 2007, B 75, 195410.
16. Song, I.-h.; Ajmera, P. K. Use of a photoresist sacrificial layer with SU-8 electroplating mould in MEMS fabrication. J. Micromech. Microeng. 2003, 13, 816-821.
17. Miyamoto. M.; Shintani, T.; Hosaka, S.; Imura, R. Thermal Simulation Analysis of Scanning Near-Field Optical Microscope Point Heating Mechanisms. Jpn. J. Appl Phys. Part 2 1996, 35, L584-L586.
18. Mulet, J. P.; Joulain, K.; Carminati, R.; Greffet. J. J. Nanoscale radiative heat transfer between a small particle and a plane surface. Appl. Phys. Lett. 2001, 78, 2931-2933.
19. Chapuis, P. O.; Greffet, J. J.; Joulain, K.; Volz, S. Heat transfer between a nano-tip and a surface. Nanotechnology 2006, 17. 2978-2981.
20. McCarthy, B.; Zhao, Y. M.; Grover, R.: Sarid, D. Enhanced Raman scattering for temperature measurement of a laser-heated atomic force microscope tip. Appl. Phys. Lett. 2005, 86, 111914.
21. Vettiger. P. The "millipede" - nanotechnology entering data storage. IEEE Trans. Nanotechnol. 2002, 1, 39-55.