An analytical model for the capacitance between probe tip and dielectric film deduced by high-frequency electromagnetic-field simulations

Journal of Applied Physics

Volumn 105, Issue 4, 2009, Pages

  Naitou, Y ^a   Yasaka, A ^b   Ookubo, N ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b SII NANOTECHNOLOGY INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC DEVICES; DIELECTRIC FILMS; DIELECTRIC PROPERTIES; THREE DIMENSIONAL;

ANALYTICAL MODELS; DIELECTRIC PERMITTIVITIES; ELECTROMAGNETIC-FIELD SIMULATIONS; FILM PROPERTIES; HIGH FREQUENCIES; LOGARITHMIC DEPENDENCES; NANO-SCALE; PROBE TIPS; TIP GEOMETRIES; TIP SHAPES;

PROBES;

EID: 61449115885     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3082110     Document Type: Article

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