High-spatial-resolution scanning capacitance microscope using all-metal probe with quartz tuning fork

Applied Physics Letters

Volumn 85, Issue 11, 2004, Pages 2131-2133

  Naitou, Yuichi ^a,b   Ookubo, Norio ^a  

^a NEC CORPORATION   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE; ELECTRIC FIELDS; ELECTRODES; FREQUENCY MODULATION; NEAR FIELD SCANNING OPTICAL MICROSCOPY; PIEZOELECTRICITY; POLYSILICON; PROBES; QUARTZ APPLICATIONS; RESONATORS; ULTRAVIOLET RADIATION; VOLTAGE CONTROL;

GATE ELECTRODES; SCANNING CAPACITANCE MICROSCOPES (SCM); SCANNING PROBE MICROSCOPY (SPM); SPATIAL RESOLUTION; TUNING FORK;

MOSFET DEVICES;

EID: 5444219928     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1791342     Document Type: Article

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