SCOPUS 정보 검색 플랫폼

Journal of Electronic Materials

Volumn 38, Issue 3, 2009, Pages 379-391

Electromigration-induced plasticity: Texture correlation and implications for reliability assessment

(8) Budiman, A S a,b Besser, P R c Hau Riege, C S c Marathe, A c Joo, Y C d Tamura, N e Patel, J R a,e Nix, W D a

a Stanford University (United States)

b Submicron Development Center (United States)

c ADVANCED MICRO DEVICES (United States)

d Seoul National University (South Korea)

e LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

Author keywords

Copper; Dislocations; Electromigration; Interconnects; Plasticity; Reliability; Texture; X ray microdiffraction

Indexed keywords

CU-INTERCONNECTS; DISLOCATIONS; EFFECTIVE DIFFUSIVITIES; HIGH CURRENT DENSITIES; IN LINES; INTERCONNECTS; INTERFACE DIFFUSIONS; LIFE TIME ASSESSMENTS; MASS TRANSPORTS; METALLIC INTERCONNECTS; PLASTIC BEHAVIORS; RELIABILITY ASSESSMENTS; SYNCHROTRON TECHNIQUES; TEXTURE; TRANSPORT PROCESS; X-RAY MICRODIFFRACTION;

COPPER; DIFFRACTION; DIFFUSION; ELECTROMIGRATION; MASS TRANSFER; OPTICAL INTERCONNECTS; PLASTICITY; RELIABILITY; TEXTURES; X RAY DIFFRACTION;

FILMS;

EID: 59849124766 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-008-0602-5 Document Type: Article

Times cited : (32)

References (27)

1
- 0000193155
- 10.1063/1.369624
- L.L. Vanasupa Y.C. Joo P.R. Besser S. Pramanick 1999 J. Appl. Phys. 85 2583 10.1063/1.369624
- (1999) J. Appl. Phys. , vol.85 , pp. 2583
- Vanasupa, L.L.¹ Joo, Y.C.² Besser, P.R.³ Pramanick, S.⁴

2
- 0037175947
- 10.1063/1.1525880
- B.C. Valek J.C. Bravman N. Tamura A.A. MacDowell R. Celestre H. Padmore R. Spolenak W.L. Brown B.W. Batterman J.R. Patel 2002 Appl. Phys. Lett. 81 4168 10.1063/1.1525880
- (2002) Appl. Phys. Lett. , vol.81 , pp. 4168
- Valek, B.C.¹ Bravman, J.C.² Tamura, N.³ MacDowell, A.A.⁴ Celestre, R.⁵ Padmore, H.⁶ Spolenak, R.⁷ Brown, W.L.⁸ Batterman, B.W.⁹ Patel, J.R.¹⁰

3
- 0141955882
- 10.1063/1.1600843
- B.C. Valek N. Tamura R. Spolenak W.A. Caldwell A. MacDowell R.S. Celestre H.A. Padmore J.C. Bravman B.W. Batterman W.D. Nix J.R. Patel 2003 J. Appl. Phys. 94 3757 10.1063/1.1600843
- (2003) J. Appl. Phys. , vol.94 , pp. 3757
- Valek, B.C.¹ Tamura, N.² Spolenak, R.³ Caldwell, W.A.⁴ MacDowell, A.⁵ Celestre, R.S.⁶ Padmore, H.A.⁷ Bravman, J.C.⁸ Batterman, B.W.⁹ Nix, W.D.¹⁰ Patel, J.R.¹¹

4
- 33745050126
- 10.1063/1.2210451
- A.S. Budiman N. Tamura B.C. Valek K. Gadre J. Maiz R. Spolenak W.D. Nix J.R. Patel 2006 Appl. Phys. Lett. 88 233515 10.1063/1.2210451
- (2006) Appl. Phys. Lett. , vol.88 , pp. 233515
- Budiman, A.S.¹ Tamura, N.² Valek, B.C.³ Gadre, K.⁴ Maiz, J.⁵ Spolenak, R.⁶ Nix, W.D.⁷ Patel, J.R.⁸

5
- 12844288624
- A.S. Budiman N. Tamura B.C. Valek K. Gadre J. Maiz R. Spolenak W.A. Caldwell W.D. Nix J.R. Patel 2004 Mater. Res. Soc. Symp. Proc. 812 345
- (2004) Mater. Res. Soc. Symp. Proc. , vol.812 , pp. 345
- Budiman, A.S.¹ Tamura, N.² Valek, B.C.³ Gadre, K.⁴ Maiz, J.⁵ Spolenak, R.⁶ Caldwell, W.A.⁷ Nix, W.D.⁸ Patel, J.R.⁹

6
- 33749643538
- A.S. Budiman N. Tamura B.C. Valek K. Gadre J. Maiz R. Spolenak J.R. Patel W.D. Nix 2006 Mater. Res. Soc. Symp. Proc. 914 295
- (2006) Mater. Res. Soc. Symp. Proc. , vol.914 , pp. 295
- Budiman, A.S.¹ Tamura, N.² Valek, B.C.³ Gadre, K.⁴ Maiz, J.⁵ Spolenak, R.⁶ Patel, J.R.⁷ Nix, W.D.⁸

7
- 0037366817
- 10.1107/S0909049502021362
- N. Tamura A.A. MacDowell R. Spolenak B.C. Valek J.C. Bravman W.L. Brown R.S. Celestre H.A. Padmore B.W. Batterman J.R. Patel 2003 J. Synchrotron Radiat. 10 137 10.1107/S0909049502021362
- (2003) J. Synchrotron Radiat. , vol.10 , pp. 137
- Tamura, N.¹ MacDowell, A.A.² Spolenak, R.³ Valek, B.C.⁴ Bravman, J.C.⁵ Brown, W.L.⁶ Celestre, R.S.⁷ Padmore, H.A.⁸ Batterman, B.W.⁹ Patel, J.R.¹⁰

8
- 0000015069
- R.W. Cahn 1949 J. Inst. Met. 86 121
- (1949) J. Inst. Met. , vol.86 , pp. 121
- Cahn, R.W.¹

9
- 50449140340
- 10.1016/0001-6160(53)90054-6
- J.F. Nye 1953 Acta Metall. 1 153 10.1016/0001-6160(53)90054-6
- (1953) Acta Metall. , vol.1 , pp. 153
- Nye, J.F.¹

10
- 18544402220
- 10.1007/s11664-001-0038-7
- P. Besser E. Zschech W. Blum D. Winter R. Ortega S. Rose M. Herrick M. Gall S. Thrasher M. Tiner B. Baker G. Braeckelmann L. Zhao C. Simpson C. Capasso H. Kawasaki E. Weitzman 2001 J. Electron. Mater. 30 320 10.1007/s11664-001- 0038-7
- (2001) J. Electron. Mater. , vol.30 , pp. 320
- Besser, P.¹ Zschech, E.² Blum, W.³ Winter, D.⁴ Ortega, R.⁵ Rose, S.⁶ Herrick, M.⁷ Gall, M.⁸ Thrasher, S.⁹ Tiner, M.¹⁰ Baker, B.¹¹ Braeckelmann, G.¹² Zhao, L.¹³ Simpson, C.¹⁴ Capasso, C.¹⁵ Kawasaki, H.¹⁶ Weitzman, E.¹⁷

11
- 0002762568
- IEEE, Piscataway, NY
- J.E. Sanchez Jr., and P.R. Besser, Proceedings of the International Interconnect Technology Conference (IEEE, Piscataway, NY, 1998), p. 233.
- (1998) Proceedings of the International Interconnect Technology Conference , pp. 233
- Sanchez Jr., J.E.¹ Besser, P.R.²

12
- 0742303040
- 10.1007/s11664-004-0293-5
- J.M. Paik K.C. Park Y.C. Joo 2004 J. Electron. Mater. 33 48 10.1007/s11664-004-0293-5
- (2004) J. Electron. Mater. , vol.33 , pp. 48
- Paik, J.M.¹ Park, K.C.² Joo, Y.C.³

13
- 0012169025
- S.P. Baker Y.C. Joo M.P. Knaub E. Artz 2000 Acta Mater. 48 2199
- (2000) Acta Mater. , vol.48 , pp. 2199
- Baker, S.P.¹ Joo, Y.C.² Knaub, M.P.³ Artz, E.⁴

14
- 0003753387
- Pergamon Oxford
- 14. H.J. Frost, M.F. Ashby, Deformation-Mechanism Maps: The Plasticity and Creep of Metals and Ceramics. Pergamon, Oxford, 21, 1982
- (1982) Deformation-Mechanism Maps: The Plasticity and Creep of Metals and Ceramics , pp. 21
- Frost, H.J.¹ Ashby, M.F.²

15
- 33746008238
- 10.1557/jmr.2006.0196
- D. Gan P.S. Ho Y. Pang R. Huang J. Leu J. Maiz T. Scherban 2006 J. Mater. Res. 21 1512 10.1557/jmr.2006.0196
- (2006) J. Mater. Res. , vol.21 , pp. 1512
- Gan, D.¹ Ho, P.S.² Pang, Y.³ Huang, R.⁴ Leu, J.⁵ Maiz, J.⁶ Scherban, T.⁷

16
- 0032642756
- 10.1016/S1359-6462(99)00213-4
- B. Cai Q.P. Kong L. Lu K. Lu 1999 Scr. Mater. 41 755 10.1016/S1359- 6462(99)00213-4
- (1999) Scr. Mater. , vol.41 , pp. 755
- Cai, B.¹ Kong, Q.P.² Lu, L.³ Lu, K.⁴

17
- 0026205635
- 10.1016/0038-1098(91)90613-Z
- W. Dickenscheid R. Birringer H. Gleiter O. Kanert B. Michel B. Gunther 1991 Solid State Commun. 79 683 10.1016/0038-1098(91)90613-Z
- (1991) Solid State Commun. , vol.79 , pp. 683
- Dickenscheid, W.¹ Birringer, R.² Gleiter, H.³ Kanert, O.⁴ Michel, B.⁵ Gunther, B.⁶

18
- 0028532844
- 10.1016/0956-7151(94)90424-3
- Z. Suo 1994 Acta Metall. Mater. 42 3581 10.1016/0956-7151(94)90424-3
- (1994) Acta Metall. Mater. , vol.42 , pp. 3581
- Suo, Z.¹

19
- 0006868575
- 10.1063/1.360925
- A.S. Oates 1996 J. Appl. Phys. 79 163 10.1063/1.360925
- (1996) J. Appl. Phys. , vol.79 , pp. 163
- Oates, A.S.¹

20
- 84990733152
- J.R. Black, Sixth Annual IEEE Intl. Rel. Phys. Symp. Proc., 1967, p. 148.
- (1967) Sixth Annual IEEE Intl. Rel. Phys. Symp. Proc. , pp. 148
- Black, J.R.¹

21
- 0000697090
- 10.1063/1.336731
- M. Shatzkes J.R. Llyod 1986 J. Appl. Phys. 59 3890 10.1063/1.336731
- (1986) J. Appl. Phys. , vol.59 , pp. 3890
- Shatzkes, M.¹ Llyod, J.R.²

22
- 0019713373
- 10.1016/0026-2714(81)90242-0
- K.A. Danso L. Tullos 1981 Microelectron. Reliab. 21 513 10.1016/0026-2714(81)90242-0
- (1981) Microelectron. Reliab. , vol.21 , pp. 513
- Danso, K.A.¹ Tullos, L.²

23
- 0022207691
- H.A. Schafft, T.C. Grant, A.N. Saxena, and C.Y. Kao, 23rd Annual IEEE Intl. Rel. Phys. Symp. Proc., 1985, p. 93.
- (1985) 23rd Annual IEEE Intl. Rel. Phys. Symp. Proc. , pp. 93
- Schafft, H.A.¹ Grant, T.C.² Saxena, A.N.³ Kao, C.Y.⁴

24
- 0003354983
- 10.1063/1.350305
- R. Kirchheim U. Kaeber 1991 J. Appl. Phys. 70 172 10.1063/1.350305
- (1991) J. Appl. Phys. , vol.70 , pp. 172
- Kirchheim, R.¹ Kaeber, U.²

25
- 34548726178
- A.S. Budiman, C.S. Hau-Riege, P.R. Besser, A. Marathe, Y.-C. Joo, N. Tamura, J.R. Patel, and W.D. Nix, 45th Annual IEEE Intl. Rel. Phys. Symp. Proc., 2007, pp. 122-127
- (2007) 45th Annual IEEE Intl. Rel. Phys. Symp. Proc. , pp. 122-127
- Budiman, A.S.¹ Hau-Riege, C.S.² Besser, P.R.³ Marathe, A.⁴ Joo, Y.-C.⁵ Tamura, N.⁶ Patel, J.R.⁷ Nix, W.D.⁸

26
- 36849063280
- A.S. Budiman, C.S. Hau-Riege, P.R. Besser, A. Marathe, Y.-C. Joo, N. Tamura, J.R. Patel, and W.D. Nix, 9th Intl. Workshop on Stress-induced Phenomena in Metallization AIP Proc., vol. 945, 2007, p. 56.
- (2007) 9th Intl. Workshop on Stress-induced Phenomena in Metallization AIP Proc. , vol.945 , pp. 56
- Budiman, A.S.¹ Hau-Riege, C.S.² Besser, P.R.³ Marathe, A.⁴ Joo, Y.-C.⁵ Tamura, N.⁶ Patel, J.R.⁷ Nix, W.D.⁸

27
- 59849110494
- E. Zschech M.A. Meyer E. Langer 2004 Mater. Res. Soc. Proc. 812 F.7.5.1
- (2004) Mater. Res. Soc. Proc. , vol.812 , pp. 751
- Zschech, E.¹ Meyer, M.A.² Langer, E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.