Relationship between Grain Structures and Texture of Damascene Cu Lines

Journal of Electronic Materials

Volumn 33, Issue 1, 2004, Pages 48-52

  Paik, Jong Min ^a   Park, Ki Chul ^b   Joo, Young Chang ^a  

^a Seoul National University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Damascene Cu; Grain structure; Texture; X ray diffraction

Indexed keywords

ANISOTROPY; BAMBOO; CRYSTAL MICROSTRUCTURE; DIFFUSION; GRAIN BOUNDARIES; POLISHING; TEXTURES; X RAY DIFFRACTION;

DAMASCENE; POLYGRANULAR CLUSTERS;

COPPER;

EID: 0742303040     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-004-0293-5     Document Type: Article

References (11)

1. C.-K. Hu, M.B. Small, F. Kaufman, and D.J. Pearson, Mater. Res. Soc. Symp. Proc. 369, 225 (1990).
2. C. Lingk, M.E. Gross, and W.L. Brown, Appl. Phys. Lett. 74, 682 (1999).
3. L. Vanasupa, Y.C. Joo, P.R. Besser, and S. Pramanick, J. Appl. Phys. 85, 2583 (1999).
4. M.E. Gross et al., Mater. Res. Soc. Symp. Proc. 514, 293 (1998).
5. P.R. Bessern et al., J. Electron. Mater. 30, 320 (2001).
6. Y.-C. Joo and C.V. Thompson, Appl. Phys. Lett. 76, 11 (1994).
7. C.-K. Hu, R. Rosenberg, and K.Y. Lee, Appl. Phys. Lett. 74, 2945 (1999).
8. C.S. Hau-Riege and C.V. Thompson, Appl. Phys. Lett. 78, 3451 (2001).
9. G. Schindler, W. Steinhogl, G. Steinlesberger, M. Traving, and M. Engelhardt, Proc. Adv. Metallization Conf. AMC 2002 (Warrendale, PA: MRS, 2002), p. 13.
10. P.R. Besser, J.E. Sanchez, Jr., D.P. Field, S. Pramanick, and K. Sahota, Mater. Res. Soc. Symp. Proc. 473, 217 (1997).
11. D.A. Porter and K.E. Easterling, Phase Transformations in Metals and Alloys, 2nd ed. (London: Chapman & Hall, 1992), pp. 116-122.