Silicon threshold displacement energy determined by photoluminescence in electron-irradiated cubic silicon carbide

Journal of Applied Physics

Volumn 105, Issue 2, 2009, Pages

  Lef̀vre, J́ŕmie ^a   Costantini, Jean Marc ^b   Esnouf, St́phane ^a,c   Petite, Guillaume ^a  

^a LABORATOIRE DES SOLIDES IRRADIÉS   (France)

^b SRMA   (France)

^c CNRS UMR 3299   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; ATOMIC SPECTROSCOPY; ATOMS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SPIN RESONANCE SPECTROSCOPY; ELECTRONS; ENERGY DISSIPATION; LIGHT EMISSION; LUMINESCENCE; NONMETALS; NUCLEAR INDUSTRY; PARAMAGNETIC RESONANCE; PARAMAGNETISM; PHOTOLUMINESCENCE; POINT DEFECTS; SILICON CARBIDE; VACANCIES;

ANGULAR DISPERSIONS; BEST FITS; CONCENTRATION OF; CROSS SECTIONS; CUBIC SILICON CARBIDES; DEFECT FORMATIONS; ELECTRON PARAMAGNETIC RESONANCE SPECTROSCOPIES; ENERGY LOSS; EXPERIMENTAL DATUM; LATTICE DIRECTIONS; PHOTOLUMINESCENCE SIGNALS; POLYTYPE; SILICON ATOMS; SINGLE VACANCIES; SUB LATTICES; THRESHOLD DISPLACEMENT ENERGIES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 59349118940     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3072681     Document Type: Article

References (38)

1. S. Seshadri, A. R. Dulloo, F. H. Ruddy, J. G. Seideil, and L. G. Rowland, IEEE Trans. Electron Devices 0018-9383 10.1109/16.748878 46, 567 (1999).
2. B. G. Kim, Y. Choi, J. W. Lee, D. S. Sohn, and G. M. Kim, J. Nucl. Mater. 0022-3115 10.1016/S0022-3115(00)00365-2 281, 163 (2000).
3. G. R. Hopkins and R. J. Price, Nucl. Eng. Des. 2, 111 (1985). 0029-5493
4. P. Angelini, J. Sevely, K. Hasein, and G. Zanchi, Analytical Electron Microscopy, D. C. Joy, ed. (San Francisco Press, San Francisco, 1987), p. 267.
5. W. Jiang, W. J. Weber, S. Thevuthasan, and D. E. McCready, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/S0168-583X(98)00717-4 148, 557 (1999).
6. A. A. Rempel, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.89.185501 89, 185501 (2002).
7. X. Kerbiriou, M. -F. Barthe, S. Esnouf, P. Desgardin, G. Blondiaux, and G. Petite, J. Nucl. Mater. 0022-3115 10.1016/j.jnucmat.2007.01.023 362, 202 (2007).
8. D. Volm, B. K. Meyer, E. N. Mokhov, and P. G. Baranov, Mater. Res. Soc. Symp. Proc. 339, 704 (1994).
9. J. W. Steeds, G. A. Evans, I. R. Danks, S. Furket, W. Voegeli, M. M. Ismail, and F. Carosella, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(02) 00212-1 11, 1923 (2002).
10. A. L. Barry, B. Lehmann, D. Fritsch, and D. Brauning, IEEE Trans. Nucl. Sci. 0018-9499 10.1109/23.124082 38, 1111 (1991).
11. B. Hudson and B. Sheldon, J. Microsc. 97, 113 (1972). 0022-2720
12. L. Hønstvet, R. E. Smallman, and P. M. Marquis, Philos. Mag. A 41, 201 (1980). 0141-8610
13. I. I. Geiczy, A. A. Nesterov, and L. S. Smirnov, Radiat. Eff. 9, 243 (1971). 0033-7579
14. O. Chauvet, Mater. Sci. Forum 83-87, 1201 (1992).
15. X. D. Chen, C. L. Yang, M. Gong, W. K. Ge, S. Fungl, C. D. Beling, J. N. Wang, M. K. Lui, and C. C. Ling, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett. 92.125504 92, 125504 (2004).
16. A. A. Rempel, W. Sprengel, K. Blaurock, K. G. Reichle, J. Majorl, and H. E. Shaefer, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.91.109602 91, 109602 (2003).
17. J. Baro, J. Sempau, J. M. Fernander Varea, and F. Salvat, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/0168-583X(95)00349-5 100, 31 (1995).
18. W. J. Choyke, Z. C. Feng, and J. A. Powel, J. Appl. Phys. 0021-8979 10.1063/1.341532 64, 3163 (1988).
19. J. Lef̀vre, Ph.D. thesis, École Polytechnique, 2008.
20. H. Itoh and M. Yoshikawa, IEEE Trans. Nucl. Sci. 0018-9499 10.1109/23.101184 37, 1732 (1990).
21. M. Bockstedte, A. Mattausch, and O. Pankratov, Phys. Rev. B 0163-1829 10.1103/PhysRevB.68.205201 68, 205201 (2003).
22. D. Lesueur, Philos. Mag. A 44, 905 (1981). 0141-8610
23. G. H. Kinchin and R. S. Pease, Rep. Prog. Phys. 0034-4885 10.1088/0034-4885/18/1/301 18, 1 (1955).
24. L. Storasta, Ph.D. thesis, Linköping University, 2003.
25. H. J. von Bardeleben, J. L. Cantin, I. Vickridge, and G. Battistig, Phys. Rev. B 0163-1829 10.1103/PhysRevB.62.10126 62, 10126 (2000).
26. A. Matsunaga, C. Kinoshita, K. Nakai, and Y. Tomokiyo, J. Nucl. Mater. 179-181, 457 (1991). 0022-3115
27. R. Devanathan and W. J. Weber, J. Nucl. Mater. 0022-3115 10.1016/S0022-3115(99)00266-4 278, 258 (2000).
28. J. Ziegler, J. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
29. H. Itoh, M. Yoshikawa, I. Nashiyama, H. Okumara, S. Misawa, and S. Yoshida, J. Appl. Phys. 0021-8979 10.1063/1.359008 77, 837 (1995).
30. H. Itoh, A. Kawasuso, T. Ohshima, M. Yoshikawa, I. Nashiyama, S. Tanigawa, S. Misawa, H. Okumura, and S. Yoshida, Phys. Status Solidi A 0031-8965 10.1002/1521-396X(199707)162:1<173::AID-PSSA1733.0.CO;2-W 162, 173 (1997).
31. J. M. Perlado, J. Nucl. Mater. 0022-3115 10.1016/S0022-3115(97)00258-4 251, 98 (1997).
32. W. Windl, T. J. Lenosky, J. D. Kress, and A. F. Voter, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/S0168-583X(98)00082-2 141, 61 (1998).
33. H. Hensel and H. M. Urbassek, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/S0168-583X(98)00284-5 142, 287 (1998).
34. R. Devanathan, T. D. de la Rubia, and W. J. Weber, J. Nucl. Mater. 0022-3115 10.1016/S0022-3115(97)00304-8 253, 47 (1998).
35. J. M. Perlado, L. Malerba, A. Sanchez-Rubio, and T. D. de la Rubia, J. Nucl. Mater. 0022-3115 10.1016/S0022-3115(99)00183-X 276, 235 (2000).
36. L. Malerba and J. M. Perlado, Phys. Rev. B 0163-1829 10.1103/PhysRevB.65. 045202 65, 045202 (2002).
37. G. Lucas and L. Pizzagalli, Phys. Rev. B 0163-1829 10.1103/PhysRevB.72. 161202 72, 161202 (R) (2005).
38. X. Kerbiriou, Ph.D. thesis, Universit́ d'Orĺans, 2006.