Design and fabrication of SU-8 micro optic fiber holder with cantilever-type elastic microclips

Microsystem Technologies

Volumn 15, Issue 3, 2009, Pages 429-435

  Ling, Z ^a   Liu, C ^a   Lian, K ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; CANTILEVER BEAMS; CLAMPING DEVICES; DEFORMATION; FABRICATION; FIBER OPTICS; FIBERS; LENSES; LITHOGRAPHY; MICROLENSES; NANOCANTILEVERS; NITRIDES; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; PHOTORESISTORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SILICON WAFERS; SURFACE TREATMENT; THREE DIMENSIONAL;

ALIGNMENT ACCURACIES; APPLICATIONS.; AS FIBERS; BEAM WIDTHS; CLAMPING FORCES; DIMENSIONAL TOLERANCES; EFFECTIVE BEAMS; ELASTIC CLAMPING; FIBER CONTACTS; FIXED ENDS; MASK PROCESSES; MATERIAL PROPERTIES; MICRO OPTICS; NOVEL TECHNIQUES; OPTICAL ALIGNMENTS; PHOTORESIST LAYERS; PREDICTED PERFORMANCES; SIMULATION BASED; UV LITHOGRAPHIES; UV LITHOGRAPHY TECHNIQUES; VISCOUS DEFORMATIONS;

PHOTORESISTS;

ASSEMBLY; CLAMPING; DEFORMATION; FIBER OPTICS; LENSES; LITHOGRAPHY; NITRIDES; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; SILICON COMPOUNDS; SURFACE TREATMENT; THREE DIMENSIONAL DESIGN;

EID: 58149330426     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0714-0     Document Type: Article

References (17)

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